Ultrasonic Megasonic Cleaning Device (Single Sheet Cleaning / Bath Tank Type Cleaning)

The SONOSYS 1MHz megasonic system (FTF transducer & MGH generator) is a high-performance system that optimizes the cleaning process of single substrates. Applications and specific processes: Wafer cleaning Photomask cleaning Cleaning of MEMS devices Removal of fine particles from display panels and IC substrates Please refer to the leaflet for more details.

Following the December issue of Transistor Technology, an article about the ultrasonic cleaning device manufactured by Sonosys was published in the January issue of Interface.

Ultrasonic cleaning devices are essential for semiconductor cleaning equipment. The ultrasonic cleaning devices provided by Sonosys are unique products in the world and are adopted by many companies. For more details, please visit the URL below.

In the November issue of Semiconductor Review, we were once again recognized as the top semiconductor technology company in Germany for 2024. Sonosys has outstanding ultrasonic cleaning technology, which is incorporated not only in Germany but also overseas and in cutting-edge ultrasonic cleaning devices in Japan. Comments from CEO Ralf Emberger are also available at the URL below. We kindly ask you to take a moment to read it.