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  5. Ultrasonic Cleaner
  6. Ultrasonic Megasonic Cleaning Device (Single Sheet Cleaning / Bath Tank Type Cleaning)

Ultrasonic Megasonic Cleaning Device (Single Sheet Cleaning / Bath Tank Type Cleaning)

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Sonosys

last updated:Aug 27, 2025

ティックコーポレーション 本社
ティックコーポレーション 本社
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Leave the latest ultrasonic cleaning to Sonosys.

Ultrasonic Cleaning Spray Nozzle For non-contact single substrate cleaning, we offer a megasonic nozzle with either a single nozzle, dual nozzle, or triple channel, and any combination of frequencies ranging from 600kHz to a maximum of 9MHz. The transducer of this megasonic nozzle generates megasonics and sends them through a fluid (such as pure water) to clean the surface of the substrate. Megasonic Immersion Transducer This is a megasonic immersion transducer with frequencies of 400kHz, 600kHz, 1MHz, and 2MHz. A sealed transducer made of stainless steel or plastic (e.g., PP, PVDF, or PFA) is installed at the bottom or side of an existing tank. In addition to standard systems for substrate sizes of 4", 6", and 8", custom immersion transducers are also available. The highly adaptable configuration allows the megasonic system to be used in bath-tank cleaning processes, improving cost-effectiveness. Frequencies available are 400kHz, 600kHz, 1MHz, and 2MHz.

    Ultrasonic OscillatorOther cleaning machinesUltrasonic Cleaner
ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg

Ultrasonic Megasonic Cleaning Device (Single Sheet Cleaning / Bath Tank Type Cleaning)

ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg
ソノシス社製超音波洗浄スプレーノズル(枚葉洗浄).jpeg 超音波洗浄装置(バス・タンク式).jpeg Triple-nozzle-ecf5619c.jpg
  • Special site - Product/service details - https://pr.mono.ipros.com/ticjapan/product/

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Applications/Examples of results

Cleaning of semiconductor wafers, photomasks, and MEMS.

catalog(10)

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Ultrasonic cleaning spray nozzle (single) 1~5MHz

Ultrasonic cleaning spray nozzle (single) 1~5MHz

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Ultrasonic cleaning spray nozzle single (600kHz)

Ultrasonic cleaning spray nozzle single (600kHz)

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Ultrasonic cleaning spray nozzle Duel (type with 2 nozzles included)

Ultrasonic cleaning spray nozzle Duel (type with 2 nozzles included)

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Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of PVDF)

Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of PVDF)

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Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of PVDF)

Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of PVDF)

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Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of stainless steel)

Ultrasonic cleaning device (bath/tank type cleaning) 4-inch substrate generator (made of stainless steel)

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Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of stainless steel)

Ultrasonic cleaning device (bath/tank type cleaning) 6-inch substrate generator (made of stainless steel)

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Lechler Sonosys (Case Study) Spray Nozzles and Ultrasonic Spray Nozzles for Semiconductor Equipment

Lechler Sonosys (Case Study) Spray Nozzles and Ultrasonic Spray Nozzles for Semiconductor Equipment

TECHNICAL
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[Sonosys] (Case Study) Ultrasonic Spray Nozzle Improvement of Non-Woven Fabric Coating Line

[Sonosys] (Case Study) Ultrasonic Spray Nozzle Improvement of Non-Woven Fabric Coating Line

TECHNICAL
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Sonosys Company Overview (Ultrasonic Cleaning Equipment)

Sonosys Company Overview (Ultrasonic Cleaning Equipment)

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News about this product(8)

The website of the ultrasonic spray nozzle manufacturer "Sonaer" has been renewed.

  • UPDATE
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The website of the ultrasonic spray nozzle manufacturer "Sonaer" has been renewed. Compared to the previous website, product browsing has improved, and we have also started offering a new system. If you are interested, please feel free to contact us.

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Our company's handled products, including air nozzles and tank cleaning nozzles from Rehlar, ultrasonic spray nozzles from Sonia, and blowers and air knives (drying devices) from Sonic, have been featured on the industrial product and manufacturer comparison site "Metory."

  • Company news

We are pleased to announce that our company's handled products, including air nozzles from Rehlar, tank cleaning nozzles, ultrasonic spray nozzles from Sonia, and blowers and air knives (drying devices) from Sonic, have been featured on the industrial product and manufacturer comparison site "Metoree." About "Metoree" Metoree is a comparison site for industrial product manufacturers aimed at engineers, researchers, and purchasing professionals. It provides useful information to help engineers easily compare and select products and manufacturers.

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The leaflet for the Sonosys Corporation's Mega Sonic System (FTF Transducer) has been completed.

  • Product news

The SONOSYS 1MHz megasonic system (FTF transducer & MGH generator) is a high-performance system that optimizes the cleaning process of single substrates. Applications and specific processes: Wafer cleaning Photomask cleaning Cleaning of MEMS devices Removal of fine particles from display panels and IC substrates Please refer to the leaflet for more details.

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An article about ultrasonic cleaning devices was published in the January issue of 【Sonosys】 Interface.

  • Product news

Following the December issue of Transistor Technology, an article about the ultrasonic cleaning device manufactured by Sonosys was published in the January issue of Interface.

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ティックコーポレーション

ティックコーポレーション 本社

Machine elements and parts

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Tick Corporation is committed to providing products that contribute to solving various issues faced by companies, such as improving production efficiency, enhancing cost efficiency, improving quality, and considering environmental conservation. We have been widely collecting product information from around the world and providing products that meet market needs. In the future, we will continue to develop and deliver products that contribute to rationalization and particularly to environmental conservation, which has become increasingly stringent in recent years. ◇◆Main Products◇◆ - Precision industrial spray nozzles - Agricultural spray nozzles - Air nozzles / Air knives - Special spray nozzles - Tank cleaning nozzles - Blowers - Ultrasonic spray nozzles (Nebulizers / Atomizers) - Ultrasonic cleaning devices - Air conveying devices - Ventilators - Plastic connectors - Cutting torches (nozzles for gas cutters) - Latex testers - In-house manufactured tubing pumps (dispensers) - Syringe pumps

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