Fluororesin coating and lining for quartz.

We will solve the problems of quartz substrate particles and corrosion!

Applying a fluororesin coating or lining to quartz is expected to provide the following benefits: 1. Cost reduction: Protecting the product from chemical solutions is expected to extend the lifespan of the quartz substrate. 2. Particle prevention: Eliminating wear on quartz due to wafer contact is expected to have a particle prevention effect. 3. Prevention of quartz and wafer damage: Due to its soft material, it is expected to prevent damage caused by contact between quartz and wafers. 4. Improved liquid drainage: High water repellency is expected to reduce the residue of chemical solutions, leading to reduced cleaning costs, and the cleaning solution is less likely to get dirty, further contributing to cost reduction. 5. Enhanced high purity: Preventing the generation of metal ions from the quartz substrate is expected to improve high purity.

Wafer processing/polishing equipmentOther semiconductor manufacturing equipment