Small Chlorine Furnace | Design and Operational Points for Safely Handling Corrosive Gases

basic information

【Key Points of Safety Design】 ■ Vacuum and Reduced Pressure Operation - Maintain the internal pressure of the furnace lower than atmospheric pressure to reduce the risk of Cl2/HCl leakage outside the furnace. - Operate under negative pressure as a fundamental safety principle when using corrosive gases. ■ Corrosion Countermeasures for Gas Contact Areas - Consider the corrosion resistance of the furnace body, piping, and sealing areas that come into contact with Cl2/HCl. - Explore configurations that are less prone to corrosion even in high-temperature gas environments. - Design considerations can also accommodate CE, SEMI, and UL standard certifications. ■ Standardization of Operating Procedures - Organize procedures for startup, purging, gas introduction, processing, exhaust, and shutdown. - Manage flow rate, temperature, pressure, and residence time to ensure reproducibility and safety. ■ Safety Measures for Abnormal Conditions - Integration with gas detectors, emergency shut-off valves, and interlocks. - Scrubber integration considering unreacted Cl2/HCl and byproduct gases. - Fail-safe design that facilitates easy transition to a safe state during abnormal conditions. *Specifications will be proposed according to processing temperature, gas type, flow rate, pressure, and decontamination conditions.

Price information

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Applications/Examples of results

【Recommended for the following individuals】 ■ Considering Cl2/HCl treatment but have safety concerns ■ Looking for a small test furnace that uses corrosive gases ■ Want to explore dry processes for removing metal impurities and selective chlorination ■ Have concerns about handling chlorine gas in existing furnaces ■ Want to consider equipment that includes gas detection, emergency shutdown, and scrubber interlock ■ After confirming conditions in the test furnace, want to think about scaling up to mass production furnaces 【Applicable Fields】 ■ Dry removal of metal impurities using Cl2/HCl ■ Selective chlorination of oxides, metals, and ceramic powders ■ Consideration of cleaning quartz, SiC, AlN, carbon, and ceramic fixtures ■ Material evaluation in a corrosive gas atmosphere ■ Separation and recovery of rare metals and metal components ■ Consideration of replacing wet processing with dry processing Even if the materials, target impurities, processing temperatures, gas concentrations, and removal conditions are not yet determined, you can consult us according to your application.