Metal furnace | Reducing the influence of O, C, and H₂O in an ultra-high vacuum and high-purity atmosphere.
Control of degassing, dehydration, and decarbonization of oxide and nitride materials in ultra-high vacuum to reducing atmosphere.
The "metal furnace" we handle is an electric furnace designed for high-purity heat treatment in an ultra-high vacuum atmosphere. By constructing the hot zone inside the furnace with metal materials, it suppresses outgassing and carbon contamination from graphite materials, insulation materials, and organic substances, creating a clean heat treatment environment that reduces the influence of oxygen, carbon, and moisture. The metal furnace accommodates atmosphere control from ultra-high vacuum to Ar/N₂/H₂, thanks to its metal heater and metal chamber structure, making it suitable for degassing, dehydration, decarbonization, and reduction treatment of high-purity powders and ceramic components. **Features** - Supports ultra-high vacuum atmosphere - Achieves vacuum levels of 10^-3 to 10^-5 Pa - Metal hot zone construction - Reduces contamination from furnace materials due to metal heater and chamber structure - High-precision temperature and atmosphere control - Accommodates atmosphere control tailored to specific needs, including vacuum, Ar, N₂, and H₂ - Scalable from small to large - After confirming conditions with a small unit, expansion to a larger furnace can be considered Additionally, we can conduct firing tests using actual samples as a condition check before equipment installation. *For more details, please feel free to contact us.*
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basic information
【Regarding such issues】 ■ In ultra-high purity oxide powders and ceramic materials, ppm-level impurities of C, H, and O significantly affect physical properties. ■ It is difficult to avoid carbon contamination and reduction reactions from furnace materials in conventional electric furnaces. ■ During high-temperature processing, we want to efficiently remove adsorbed water, CO₂, and residual organic substances generated from within the samples. ■ There are few lab-scale devices capable of reproducibly implementing high-purity processes. 【What can be addressed with a metal furnace】 ■ Degassing, dehydration, and decarbonization treatment in an ultra-high vacuum atmosphere. ■ Reduction of contamination effects from oxygen, carbon, and moisture. ■ Suppression of outgassing from graphite materials and insulation materials. ■ Atmosphere switching between vacuum, Ar, N₂, H₂, etc. ■ Examination of heat treatment conditions for high-purity powders and ceramic materials. *For more details, please feel free to contact us.
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Applications/Examples of results
【Applications and Examples】 ■ Degassing, dehydration, and decarbonization of high-purity oxide powders and ceramics - SiO₂, Al₂O₃, ZrO₂, HfO₂, La₂O₃, etc. - Reduction of adsorbed water, CO₂, residual organic matter, and carbon-derived components ■ Pre-treatment of oxide target materials and ceramic components - High-purity treatment of sputtering targets, pre-sintering powders, and molded bodies - Degassing, dehydration, and reduction of residual carbon before firing ■ Purification of nitride powders and reduction of residual oxygen - Si₃N₄, AlN, BN, etc. - Examination of conditions in vacuum, Ar, N₂, and H₂ atmospheres ■ Confirmation of conditions before the introduction of high-purity materials - Verification of temperature, achieved vacuum level, holding time, and atmospheric conditions using actual samples *For more details, please feel free to contact us.
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Company information
Our company integrates three technologies: "electricity," "equipment," and "chemistry," using our unique know-how to develop innovative heating furnaces and other equipment. We handle various electric furnaces (heating furnaces) such as carbon furnaces, multi-atmosphere furnaces, metal furnaces, and chlorine furnaces, leveraging our proprietary high-temperature electric furnace technology. We are not just an equipment manufacturer; we are a strategic development partner that supports innovative manufacturing with advanced heating, looking ahead to the standards of the next decade alongside our customers.
