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  6. Improving yield with precision filtration equipment for semiconductor coolant.

Improving yield with precision filtration equipment for semiconductor coolant.

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last updated:Jan 05, 2026

ROKA SEIKO Co., Ltd.
ROKA SEIKO Co., Ltd.
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1μm filtration! Contributing to improved yield in semiconductor manufacturing.

In the semiconductor industry, maintaining processing accuracy is crucial for the stable production of high-quality products. Foreign substances in the coolant can lead to processing defects and degradation of product performance, potentially lowering yield rates. Our coolant precision filtration system keeps the coolant clean with a filtration accuracy of 1μm, stabilizing processing accuracy and contributing to yield improvement. 【Usage Scenarios】 - Grinding, polishing, and cutting processes in semiconductor manufacturing - Stabilization of processing accuracy - Reduction of defect rates 【Effects of Implementation】 - Decrease in processing defects - Reduction of defect rates - Improvement in product quality

    Grinding MachineWafer processing/polishing equipmentOther semiconductor manufacturing equipment
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Improving yield with precision filtration equipment for semiconductor coolant.

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TOP.PNG IPROS93315892353915155644.jpeg IPROS94718747384669293940.jpeg
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**Features** - 1μm filtration precision - High flow rate compatibility - Reduction of running costs through patented backwashing system - Compatible with water-soluble and oil-based coolant liquids - Can be installed on both new and existing machining machines **Our Strengths** We have been dedicated to the development and dissemination of high-performance filtration systems specialized for precision machinery coolants. Our systems are adopted by various companies across different fields, including major lens manufacturers, leading precision electronics manufacturers, and automotive parts manufacturers. We actively propose solutions for the entire coolant system and sludge (machining chips) recovery and processing.

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*For more details, please refer to the materials. Feel free to contact us as well.*

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[Technical Information] Understand this! The Role and Benefits of Coolant Filtration Systems

[Technical Information] Understand this! The Role and Benefits of Coolant Filtration Systems

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Surprisingly Unknown? Cost-Effectiveness and Benefits of Introducing Precision Filtration Equipment

Surprisingly Unknown? Cost-Effectiveness and Benefits of Introducing Precision Filtration Equipment

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Company information

ROKA

ROKA SEIKO Co., Ltd.

Industrial Machinery

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Our company has been dedicated to the development and dissemination of high-performance filtration systems specifically for precision machine coolants among various types of coolants (cutting fluids). In recent years, we have not only focused on precision filtration devices but have also leveraged our accumulated expertise to propose complete coolant systems, including coolant tank manufacturing. We are actively suggesting solutions for the recovery and treatment of sludge (cutting chips) as well. The ROKA Precision Coolant Filtration System has been adopted by various companies across different fields, including major lens manufacturers, leading precision electronics manufacturers, and automotive parts manufacturers. It has significantly contributed to improving machining accuracy and production efficiency, as well as reducing waste disposal costs and minimizing environmental impact.

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  • Manufacturing and processing machinery
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