Electrostatic chuck and ESC atmosphere sintering furnace

For the firing conditions of ESC ceramic components. Contributes to improving the reproducibility of firing quality with an N₂ + H₂ reduction atmosphere and dew point control.

This is a high-temperature sintering furnace with atmosphere control designed for electrostatic chucks (ESC) and the firing, reduction treatment, and binder removal of ceramic components. It supports operation in N₂ and N₂ + H₂ reduction atmospheres, enabling high-temperature processing up to 1000°C for regular use and a maximum of 1650°C. Additionally, with optional features, it can accommodate wet gas introduction, dew point control, and dry/wet switching, making it useful for examining conditions related to the firing quality, densification, insulation properties, surface condition, and internal electrode state of materials. Since it allows for processing while switching atmospheres within the same chamber, it helps reduce movement between processes and exposure to outside air, contributing to improved reproducibility of firing conditions, reduced variation, and increased efficiency in prototype evaluation. If you are facing challenges with firing conditions for ESCs, N₂ + H₂ reduction treatment, or dew point management in ceramic firing, please feel free to consult us.

Industrial Furnace