Direct Position Measurement / Clear Aperture Compatible P-733Z
High Rigidity Piezo Z Nanopositioning Stage P-733.Z
High-rigidity piezo Z-stage achieving 0.3 nm resolution and high-speed response.
The P-733.Z is a high-stiffness piezo Z nano-positioning stage that combines nanometer-level resolution with high-speed response performance. It features a travel range of 100µm and a clear aperture of 50×50mm, making it suitable for applications such as positioning in microscopes and masks/wafers. Non-contact capacitive sensors enable measurements with sub-nanometer resolution. It also achieves a maximum resolution of 0.3nm and high repeatability. The flexure guide structure eliminates wear and backlash, allowing for stable high-precision positioning over long periods. It employs PI's proprietary PICMA(R) actuators, achieving up to 10 times the lifespan compared to conventional polymer-insulated actuators.
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basic information
Drive method: PICMA(R) multilayer piezo actuator - Movement direction: Z-axis - Travel range: 100µm - Resolution: 0.3nm - Sensor: Capacitive sensor (direct position measurement) - Guide structure: Flexure guide (wear-free and backlash-free) - Clear aperture: 50 × 50 mm - High dynamics design Direct position measurement using a non-contact capacitive sensor achieves resolution below a nanometer and high repeatability. The adoption of the PICMA(R) piezo actuator ensures high-speed response and long lifespan. Due to its high rigidity structure, it is suitable for high dynamics applications such as high-speed Z-scanning and precise focus control. *For detailed specifications (resonant frequency, load capacity, controller configuration, etc.), please refer to the product catalog or contact us.*
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Applications/Examples of results
- Scanning Electron Microscope - Confocal Microscope - Mask/Wafer Alignment - Surface Measurement Technology - Nanoimprint - Micromanipulation - Image Processing/Stabilization - Nanopositioning
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Company information
The German headquarters, with over 50 years of experience and 30 years as a Japanese corporation, presents new solutions from PI, a company specializing in precision positioning products. We offer the world's number one piezo stages and actuators, as well as hexapod positioning products. Additionally, we are enhancing our lineup of linear motor-driven products and high-precision air bearing stages. In positioning, attention to the foundation is also crucial, and we provide granite bases, enabling us to propose composite systems as well. Please take a look at our diverse lineup that provides cutting-edge technology to production sites around the world, advanced equipment, and various fields of cutting-edge research.
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