High-performance resist stripping equipment that supports the microfabrication process.
In the semiconductor industry's miniaturization process, precise stripping of the resist is essential. Particularly, as density increases, the presence of resist residues and foreign substances can significantly reduce yield. Our batch-type automatic resist stripping and lift-off equipment achieves high stripping performance through a combination of heated organic chemicals and high-pressure jets. 【Application Scenarios】 * Resist stripping in microfabrication processes * Research and development applications * Small-scale production 【Benefits of Implementation】 * Improved yield due to high stripping performance * Enhanced installation efficiency through space-saving design * Reduced running costs through chemical reuse
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basic information
**Features** * Supports work sizes from 2 to 8 inches (for square substrates; please inquire about 12 inches) * Automatic transport by a SCARA robot * Liquid heating function * Safety specifications such as automatic fire extinguishing system and explosion-proof glass * Automatic cleaning function inside the chamber **Our Strengths** We respond flexibly and quickly to customer needs. We combine the functions of a "trading company" and a "manufacturer" to offer a variety of business solutions.
Price range
P7
Delivery Time
Applications/Examples of results
Optical devices (such as LEDs), SAW devices, power devices, high-frequency devices, MEMS, etc.
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Company information
We respond flexibly and promptly to customer needs. In the "trading company" functional area, we are fully committed to providing truly attractive products and services that meet customer needs by collaborating with leading specialized manufacturers and utilizing advanced mechatronics technology to add value, thereby adapting to a highly information-oriented society. In the "mechanical parking equipment" business, we manufacture and install high-quality, environmentally friendly, and safety-conscious products to meet various customer needs. Based on our accumulated wealth of experience and technology, we provide 24-hour maintenance services through a nationwide service network, earning strong trust from our customers. The "freeze-drying equipment" business consistently develops next-generation "freeze dryers," including the sealed tube-type freeze dryer, which received the Minister of Economy, Trade and Industry Award from the Japan Industrial Machinery Manufacturers Association. We deliver and maintain both small-scale research and large-scale production equipment, and we also support the development of pharmaceuticals and food, establishing ourselves as an industry leader and receiving high praise. ◆ Locations Sapporo, Hitachi, Nagoya, Osaka, Fukuoka, Yamaguchi ◆ Overseas Subsidiary Thailand - Business activities: Sales of resin molded products, metal processed products, sheet metal, packaging materials, and electronic components.
