Achieving both peeling performance and a compact footprint that supports high-precision MEMS manufacturing.
In the MEMS industry, as microfabrication technology advances, high precision and quality in the resist stripping and lift-off processes are required. In particular, the uniformity of the wafer surface and the suppression of contamination are crucial, and addressing these challenges is essential for improving product yield. This device achieves high stripping performance through the combination of heated organic solutions and high-pressure jets. It is a one-chamber system that contributes to high throughput and a reduced footprint. 【Application Scenarios】 - Resist stripping and lift-off processes in MEMS device manufacturing - Processes requiring high-precision pattern formation - Processes needing wafer surface uniformity and contamination control 【Benefits of Implementation】 - Improved yield due to high stripping performance - Increased efficiency of manufacturing lines through reduced footprint - Reduced running costs through the reuse of chemicals
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basic information
【Features】 - Unique jet lift-off mechanism with high peeling performance - Improved flexibility and reduced running costs to accommodate a variety of small quantities and fluctuations in production volume - Enhanced quality and yield through sheet processing (achieving precise processing without cross-contamination and improving uniformity and controllability within the plane) - Compatible work sizes range from 2 to 8 inches (for square substrates, please inquire about 12 inches) - Automatic cleaning function inside the chamber 【Our Strengths】 We respond flexibly and quickly to customer needs. With both "trading company" and "manufacturer" functions, we provide optimal solutions for diverse needs.
Price range
P8
Delivery Time
Applications/Examples of results
Optical devices (such as LEDs), SAW devices, power devices, high-frequency devices, MEMS, etc.
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Company information
We respond flexibly and promptly to customer needs. In the "trading company" functional area, we are fully committed to providing truly attractive products and services that meet customer needs by collaborating with leading specialized manufacturers and utilizing advanced mechatronics technology to add value, thereby adapting to a highly information-oriented society. In the "mechanical parking equipment" business, we manufacture and install high-quality, environmentally friendly, and safety-conscious products to meet various customer needs. Based on our accumulated wealth of experience and technology, we provide 24-hour maintenance services through a nationwide service network, earning strong trust from our customers. The "freeze-drying equipment" business consistently develops next-generation "freeze dryers," including the sealed tube-type freeze dryer, which received the Minister of Economy, Trade and Industry Award from the Japan Industrial Machinery Manufacturers Association. We deliver and maintain both small-scale research and large-scale production equipment, and we also support the development of pharmaceuticals and food, establishing ourselves as an industry leader and receiving high praise. ◆ Locations Sapporo, Hitachi, Nagoya, Osaka, Fukuoka, Yamaguchi ◆ Overseas Subsidiary Thailand - Business activities: Sales of resin molded products, metal processed products, sheet metal, packaging materials, and electronic components.
