Resist stripping and lift-off equipment supporting the manufacturing of high-precision MEMS devices.
In the MEMS industry, the quality of resist stripping and lift-off processes is crucial for the manufacturing of high-precision devices. Particularly in MEMS devices that utilize microfabrication technology, residual resist and uneven stripping can negatively impact product performance and reliability. Our batch-type automatic resist stripping and lift-off equipment achieves high-precision stripping performance by combining heated organic solutions with high-pressure jets for physical assistance. 【Usage Scenarios】 - Resist stripping and lift-off processes in MEMS device manufacturing - Resist removal in microfabrication processes - Resist stripping for research and development purposes 【Benefits of Implementation】 - Improved device quality through high-precision stripping - Increased productivity through high throughput - Reduced running costs through the reuse of solutions
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basic information
【Features】 - High stripping performance achieved by the combination of heated organic chemicals and high-pressure jets - Space-saving design due to compact construction - High throughput achieved with a single-chamber system - Reduced running costs through chemical separation and recovery - Compatible with work sizes from 2 to 8 inches (for square substrates; please inquire about 12 inches) 【Our Strengths】 We combine "manufacturing (manufacturer) capabilities" with "trading company capabilities" to respond flexibly and quickly to customer needs. Leveraging the know-how cultivated in the field of industrial machinery equipment such as semiconductor manufacturing and inspection systems, we contribute to solving customer challenges.
Price range
P7
Delivery Time
Applications/Examples of results
Optical devices (such as LEDs), SAW devices, power devices, high-frequency devices, MEMS, etc.
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Company information
We respond flexibly and promptly to customer needs. In the "trading company" functional area, we are fully committed to providing truly attractive products and services that meet customer needs by collaborating with leading specialized manufacturers and utilizing advanced mechatronics technology to add value, thereby adapting to a highly information-oriented society. In the "mechanical parking equipment" business, we manufacture and install high-quality, environmentally friendly, and safety-conscious products to meet various customer needs. Based on our accumulated wealth of experience and technology, we provide 24-hour maintenance services through a nationwide service network, earning strong trust from our customers. The "freeze-drying equipment" business consistently develops next-generation "freeze dryers," including the sealed tube-type freeze dryer, which received the Minister of Economy, Trade and Industry Award from the Japan Industrial Machinery Manufacturers Association. We deliver and maintain both small-scale research and large-scale production equipment, and we also support the development of pharmaceuticals and food, establishing ourselves as an industry leader and receiving high praise. ◆ Locations Sapporo, Hitachi, Nagoya, Osaka, Fukuoka, Yamaguchi ◆ Overseas Subsidiary Thailand - Business activities: Sales of resin molded products, metal processed products, sheet metal, packaging materials, and electronic components.
