Introduction of various sensors for semiconductor manufacturing equipment & exhibition information.

High-precision measurement of dew point, temperature and humidity, wind speed, and oxygen. Numerous compact models that are easy to integrate into devices! Ensures long-term stability for semiconductor manufacturing processes.

We handle various sensor products for semiconductor manufacturing equipment. Our main measurement product, the capacitive dew point meter "TK-100," which operates in the range of -100 to +20°C, is complemented by the high-response polymer dew point meter "TE-660TR," which operates from -60 to +20°C, and the galvanic oxygen concentration meter "2001RS" with % and PPM output, among a rich lineup. Additionally, we will be exhibiting our dew point meters at the Thermotech exhibition, held every four years for industrial furnaces and thermal technology. We also plan to showcase gas chromatographs, dew point meters, oxygen concentration meters, and temperature and humidity meters at semiconductor exhibitions. 【Various sensor products for semiconductor manufacturing equipment now on sale】 ■ Dew Point Meters ・Capacitive Dew Point Meter TK-100 ・Polymer Dew Point Meter TE-660TR ■ Temperature and Humidity Meters ・High-Precision EE310 ・Compact Probe EE08 ■ Anemometers ・Compact Probe EE671 ■ Oxygen Concentration Meters ・Galvanic Oxygen Concentration Meter 2001RS ■ Others ・Dew Point Handheld Unit TEKHNEPort 40 – LDPT *For more details, please download the PDF or feel free to contact us.

SensorsOther semiconductor manufacturing equipmentSensors