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  6. Introduction of various sensors for semiconductor manufacturing equipment & exhibition participation information

Introduction of various sensors for semiconductor manufacturing equipment & exhibition participation information

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last updated:Jul 31, 2026

テクネ計測
テクネ計測
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High-precision measurement of temperature, humidity, wind speed, and oxygen. Many compact models that are easy to integrate into devices! Ensuring long-term stability for semiconductor manufacturing processes.

Our company handles a variety of sensor products for semiconductor manufacturing equipment. Our main measurement product, the capacitive dew point meter "TK-100," which operates in the range of -100 to +20°C, is complemented by the high-response polymer dew point meter "TE-660TR," which operates from -60 to +20°C, and the galvanic oxygen concentration meter "2001RS," which provides output in percentage and PPM, among other offerings. Additionally, we will be exhibiting our dew point meters at the Thermotech exhibition, held every four years for industrial furnaces and thermal technology. We also plan to participate in semiconductor exhibitions, showcasing gas chromatographs, dew point meters, oxygen concentration meters, and temperature and humidity meters. 【Various sensor products for semiconductor manufacturing equipment now on sale】 ■ Dew Point Meters ・Capacitive Dew Point Meter TK-100 ・Polymer Dew Point Meter TE-660TR ■ Temperature and Humidity Meters ・High Precision EE310 ・Compact Probe EE08 ■ Anemometers ・Compact Probe EE671 ■ Oxygen Concentration Meters ・Galvanic Oxygen Concentration Meter 2001RS ■ Others ・Dew Point Handheld Unit TEKHNEPort 40 – LDPT *For more details, please download the PDF or feel free to contact us.

    SensorsOther semiconductor manufacturing equipmentSensors
IPROS13615637131636618575.png

Introduction of various sensors for semiconductor manufacturing equipment & exhibition participation information

IPROS13615637131636618575.png
IPROS13615637131636618575.png
  • Related Link - https://www.tekhne.co.jp/products_use/semiconducto…
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Our company will exhibit at the Thermotech exhibition, held every four years for industrial furnaces and thermal technology, where we plan to showcase dew point meters. Additionally, we will also participate in a semiconductor exhibition, displaying gas chromatographs, dew point meters, oxygen concentration meters, and temperature and humidity meters. 【Exhibition Information】 <Thermotech> ■ Dates: September 9 (Wed) - September 11 (Fri), 2026 ■ Venue: Tokyo Big Sight, South Halls 1 & 2 ■ Booth Number: S1-D024 ■ Exhibited Products: Dew point meters, oxygen concentration meters, moisture meters in oil, etc. <Kyushu Semiconductor Industry Exhibition> ■ Dates: September 30 (Wed) - October 1 (Thu), 2026 ■ Venue: Marine Messe Fukuoka, Halls A & B ■ Booth Number: A3-44 ■ Exhibited Products: Gas chromatographs, CRDS trace analyzers, dew point meters, oxygen concentration meters, temperature and humidity meters *For more details, please download the PDF or feel free to contact us.

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Semiconductor brochure

Semiconductor brochure

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Brochure for Heat Treatment

Brochure for Heat Treatment

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CRDS Simple Trace Analysis Instrument Spark Series Catalog_Version 2

CRDS Simple Trace Analysis Instrument Spark Series Catalog_Version 2

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Explosion-proof dew point meter (capacitive type) TK-100TR-EX

Explosion-proof dew point meter (capacitive type) TK-100TR-EX

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TE-660 Polymer Formula Set Dew Point Transmitter Catalog

TE-660 Polymer Formula Set Dew Point Transmitter Catalog

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201RS・2001RS Series Galvanic Battery-Powered Panel Mount Oxygen Concentration Meter Catalog

201RS・2001RS Series Galvanic Battery-Powered Panel Mount Oxygen Concentration Meter Catalog

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Temperature and Humidity Transmitter EE08

Temperature and Humidity Transmitter EE08

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Temperature and Humidity Dew Point Transmitter EE310

Temperature and Humidity Dew Point Transmitter EE310

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Humidity and Temperature Transmitter HTP201 Catalog

Humidity and Temperature Transmitter HTP201 Catalog

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Wall-mounted Temperature and Humidity Transmitter HTS201 Catalog

Wall-mounted Temperature and Humidity Transmitter HTS201 Catalog

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General-purpose small anemometer (transmitter) EE671

General-purpose small anemometer (transmitter) EE671

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テクネ計測

テクネ計測

Testing, Analysis and Measurement

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We introduce various measuring instruments and devices related to moisture management, including the domestic capacitive dew point meter TK-100 series, mirror-type dew point meters, oxygen concentration meters, humidifiers, and moisture meters for corrosive gases. By organically combining these, as well as through piping, line creation, and unitization, we provide custom-made products and respond quickly to complex issues.

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