Wafer transport handle anti-static coating | Prevents static electricity problems
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Suppressing static electricity and particle adhesion on wafers! Eliminating metal touch! With anti-static and scratch-resistant coating, it prevents scratches and electrostatic damage during transport.
This is a technical example of a functional coating with antistatic properties designed for metal or ceramic wafer handling hands (end effectors, blades, arms) that are installed at the forefront of automatic transport systems (such as EFEM and vacuum transport robots) in the semiconductor front-end and back-end processes. To transport silicon wafers quickly and safely, it achieves a balance between antistatic characteristics and scratch prevention. **Main Improvement Effects from Implementation** - **Prevention of Particle Adhesion Due to Static Electricity** By imparting conductivity and antistatic properties, it suppresses frictional charging during transport and quickly discharges static electricity. This prevents minute contamination in the cleanroom from adhering to the wafers, contributing to improved yield. - **Prevention of Wafer Scratches and Chipping** It completely eliminates metal contact with the substrate. The appropriate slipperiness and cushioning of the coating reduce the impact during pick-and-place operations, preventing fine chipping on the back and edges of the wafers. - **Reduction of Electrostatic Discharge (ESD) Risk** By preventing charging, it protects circuit patterns from electrostatic destruction and eliminates sticking to the hand, supporting stable transport.
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【Construction Technology】 Contracted Electrostatic Prevention Functional Coating (Fluororesin-based, PEEK-based, etc.) 【Technical Features and Functions】 ■ Excellent Electrostatic Prevention and Conductive Properties Shuts out frictional charging and prevents electrostatic discharge (ESD) and the adhesion of foreign substances and fine particles (particles). ■ Elimination of Metal Touch and Shock Absorption Eliminates direct contact with metal and ceramic surfaces, reducing scratches and chipping on wafers. ■ Low Wear and High Weather Resistance Suppresses wear and dust generation associated with high-speed continuous transport, maintaining a clean surface condition for an extended period. 【Target Substrates and Applicable Parts】 ■ Various metals (SUS, aluminum, etc.), various ceramics (alumina, etc.) ■ Wafer transport hands (end effectors, blades, claw parts) for EFEM and vacuum transport robots. 【Re-coating Support】 ■ Even if the coating wears out after long-term use, it can be peeled off and re-applied (re-coating). Expensive hand substrates can be reused instead of being discarded. * Re-coating is not possible for ceramic parts.
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**Main Application Areas and Devices** - Semiconductor Front-End and Back-End: EFEM (Wafer Transfer Module), Vacuum Transfer Robots, Sorting Devices - Inspection and Measurement Processes: Wafer Appearance Inspection Devices, Laser Markers, Prober Device Transfer Hands - Clean Transfer: High-Speed Pick and Place Mechanism for Glass Substrates and Silicon Wafers **Case Study of Problem Solving** - Issue: Due to "metal touch" from aluminum and ceramic hands of the automatic transfer robot, small chipping and scratches on the backside of the wafers occurred at the wafer edge. Additionally, static electricity caused by transfer friction attracted tiny particles in the cleanroom, leading to electrostatic discharge (ESD) and reduced yield. - After Implementation: Anti-static functional coating was applied to the entire contact surface of the wafer transfer hand's tip. - Effects and Results: - Dramatic reduction in wafer scratches and chipping defects. - Elimination of static electricity, significantly reducing the risk of particle adhesion and electrostatic discharge. - Elimination of sticking to the hand, achieving high-speed and stable positioning transfer.
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Nikken Coating Industry Co., Ltd. has been a specialized manufacturer of functional coatings for contract processing, earning the trust of customers across various industries for 79 years since its founding. We leverage our processing technology to maximize the properties of fluororesins, such as non-stick, lubricity, and chemical resistance, providing high-performance coatings that directly address customer challenges, including "Thermo Pro Release" for thermal welding processes and "NonStick STC" for blades and precision molds. In recent years, in response to movements regarding regulations on fluorinated compounds (PFAS), "PEEK resin," which is gaining attention as a substitute for fluororesins, has become a focus. Nikken Coating Industry commercialized the world's first PEEK resin coating, "PEEKCOAT," in 1999. Based on the solid knowledge and know-how accumulated over more than 20 years, we are further intensifying our research and development efforts to explore the potential of next-generation PEEK coatings! We aim to be recognized as "the go-to for PEEK coatings" and will continue to lead the way. As "the best partner for functional coatings that builds trust through technology," Nikken Coating Industry will continue to contribute to the creation of high-quality, high-performance products.
