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  4. Semiconductor Manufacturing Equipment
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  6. FT-IR purge gas generator

FT-IR purge gas generator

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Parker Hannifin

last updated:Apr 17, 2018

太陽計測
太陽計測
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It generates clean and dry air by removing moisture and carbon dioxide (CO2) from compressed air.

- It has a system that reliably removes carbon dioxide and water vapor, which can interfere with FT-IR measurements. - It is equipped with a coalescing filter that removes fixed particles larger than 0.01 μm. - The dew point will be -73°C. - It protects against corrosion of the beam splitter caused by moisture. - The improved S/N ratio allows for more accurate analytical results. - There is no need for a nitrogen gas cylinder, enabling operation throughout the day. (*Please prepare a separate compressed air source with moisture removed.)

    Semiconductor inspection/test equipmentAnalytical Equipment and DevicesOther environmental equipment
Spectra30.jpg

FT-IR purge gas generator

Spectra30.jpg
Spectra30.jpg

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basic information

Specifications: - Dew point: -73℃ - Maximum flow rate: 17~34L/min (at 0.86MPa) (for both models) - Carbon dioxide (CO2) content: less than 1ppm - Power supply: AC100V (50/60Hz)

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P4

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Model number overview
Spectra15 Purge gas generator (17L/min: 0.86MPa)
Spectra30 Purge gas generator (34L/min: 0.86MPa)

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太陽計測

太陽計測

Testing, Analysis and Measurement

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Taiyo Measurement Co., Ltd. sells electronic measuring instruments, communication measuring devices, control equipment, laboratory analysis instruments, and environmental equipment, including products from the Yokogawa Electric Group. We provide our customers with total solutions where measuring instruments, computing, and network environments function organically, and together with our customers, we will continue to provide the best solutions towards tomorrow, including services and maintenance.

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