Contracted Services by FE-EPMA | JTL
Observation Analysis > Analysis Services > Surface Element Analysis > FE-EPMA Analysis
We will conduct elemental analysis of small areas using a field emission electron probe microanalyzer (FE-EPMA) with high sensitivity on the submicron order.
Using FE-EPMA (Field Emission Scanning Electron Probe Microanalyzer), we conduct SEM imaging and elemental analysis using WDX (Wavelength Dispersive X-ray Spectroscopy). It features better quantitative accuracy than EDX elemental analysis (± a few hundred ppm to a few thousand ppm) and superior spatial resolution compared to general-purpose EPMA (sub-micron order). It can be used for cross-sectional analysis of thin films with thicknesses of a few hundred nm and for analyzing the diffusion state of trace elements at joint interfaces.
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basic information
**Diverse Analytical Methods** Qualitative analysis, quantitative analysis (standard quantitative and standardless quantitative), line analysis, area analysis, color mapping, etc. are possible. Simultaneous imaging of SEM images (secondary electron images, backscattered electron images, etc.) is also possible. **Analysis Space Resolution in Microscopic Regions (Sub-Micron Order)** FE-EPMA employs a field emission (FE) type electron gun, allowing for small probes even at low acceleration voltages and WDX analysis current ranges (10-100 nA), enabling high X-ray spatial resolution analysis using low acceleration voltages. The analysis area can be narrowed down to the sub-micron order, allowing for mapping at approximately 30,000 times magnification. **Excellent Energy Resolution** With an energy resolution of about 10 eV, it is possible to analyze peaks that cannot be separated by EDX. **Analysis of Trace Elements (Quantitative Accuracy of ±100ppm to ±1,000ppm)** Since one element is analyzed per channel of the spectroscopic crystal, it is suitable for the analysis of trace elements in the range of ±100ppm to ±1,000ppm (0.01% to 0.1% order). It is possible to conduct discrimination of metallic materials and analysis of the diffusion state of trace elements.
Price information
The price may vary depending on the analysis content, so please feel free to contact us.
Delivery Time
※The delivery date may vary depending on the analysis content, so please feel free to contact us.
Applications/Examples of results
- Analysis of the distribution of trace components in solder - Cross-sectional observation, component analysis, and mapping of the alloy layer - Cross-sectional observation, component analysis, and mapping of the plating
Company information
Our main business is providing technical services to evaluate the reliability of developed products. We not only provide evaluation data in accordance with standards and regulations, but also propose optimal methods, conditions, and equipment for evaluation purposes, as well as design and manufacture original equipment and jigs for non-standard evaluations. Additionally, we handle three evaluation techniques—measurement, testing, and analysis—comprehensively, allowing us to offer complex services that span diverse equipment and suggest more multifaceted evaluation methods.
