A robotic hand that inserts and removes wafers to and from a carrier without contact.
Wafers can be transported non-contact. The thin hand allows for the insertion and removal of wafers to and from the carrier. Usable in a clean room. Alignment is possible.
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basic information
The "non-contact carrier robot hand" holds wafers in a non-contact state, suspended in mid-air. This hand is designed to be thin, making it ideal for loading and unloading wafers onto carriers. It is equipped with an exhaust recovery system, allowing it to be used in clean rooms. Additionally, it has a positioning mechanism, enabling the transport of aligned wafers.
Price information
-
Delivery Time
P3
Applications/Examples of results
The "non-contact carrier robot hand" holds wafers in a suspended state without contact, floating in the air. This hand is designed to be thin, making it ideal for loading and unloading wafers onto carriers. It is equipped with an exhaust recovery system, allowing it to be used in clean rooms. Additionally, it has a positioning mechanism, enabling the transport of aligned wafers.
Company information
Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.
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