Quartz-made wafer non-contact hand

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Quartz non-contact hand "Float Chuck FTS type"

last updated：Oct 08, 2003

ソーラーリサーチ研究所大阪事業所

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Quartz non-contact robot hand. Also known as Bernoulli chuck. By ejecting gas, it generates negative pressure through the ejector effect and the Bernoulli effect.

Non-contact chucking of wafers Made of quartz Heat resistant Suitable for use in clean rooms

Related Link - http://www.solarlab.co.jp/hpseki

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basic information

Quartz non-contact robotic hand, also known as Bernoulli chuck. By ejecting gas, it generates negative pressure through the ejector effect and Bernoulli effect, as well as positive pressure through the pressure-type air cushion effect, allowing the wafer to be suspended in a non-contact state while being transported, inverted, and tilted. It can also be used in ultra-clean rooms due to the exhaust recovery mechanism.

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Quartz non-contact robot hand, also known as Bernoulli chuck. By ejecting gas, it generates negative pressure through the ejector effect and Bernoulli effect, as well as positive pressure through the pressure-type air cushion effect, allowing the wafer to be suspended in a non-contact state, enabling transport, inversion, and tilting. It can also be used in ultra-clean rooms due to the exhaust recovery mechanism.