Quartz non-contact robot hand. Also known as Bernoulli chuck. By ejecting gas, it generates negative pressure through the ejector effect and the Bernoulli effect.
Non-contact chucking of wafers Made of quartz Heat resistant Suitable for use in clean rooms
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basic information
Quartz non-contact robotic hand, also known as Bernoulli chuck. By ejecting gas, it generates negative pressure through the ejector effect and Bernoulli effect, as well as positive pressure through the pressure-type air cushion effect, allowing the wafer to be suspended in a non-contact state while being transported, inverted, and tilted. It can also be used in ultra-clean rooms due to the exhaust recovery mechanism.
Price information
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Delivery Time
P4
Applications/Examples of results
Quartz non-contact robot hand, also known as Bernoulli chuck. By ejecting gas, it generates negative pressure through the ejector effect and Bernoulli effect, as well as positive pressure through the pressure-type air cushion effect, allowing the wafer to be suspended in a non-contact state, enabling transport, inversion, and tilting. It can also be used in ultra-clean rooms due to the exhaust recovery mechanism.
Company information
Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.
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