Non-contact tweezers for high-temperature wafers
Heat-resistant specification wafer non-contact tweezers
Heat-resistant tweezers for non-contact removal of wafers from a high-temperature susceptor.
A "non-contact tweezers" designed for high-temperature operation that allows for the non-contact removal of wafers from a hot susceptor after epitaxial film deposition on semiconductor wafers using a CVD apparatus. It features a handle equipped with a manual valve, enabling gas supply ON-OFF control through valve operation with a hand holding the handle, similar to using tweezers, while the wafers are suspended and transported by a "float chuck" that holds them non-contact by ejecting gas.
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basic information
A "non-contact tweezers" designed for high temperatures, which uses gas ejection to hold and transport wafers in a suspended manner without contact, is equipped with a handle that has a manual valve. The valve operation is performed by hand using the handle like a pair of tweezers, allowing for ON-OFF control of gas supply to non-contactly remove wafers from a high-temperature susceptor.
Price information
-
Delivery Time
P4
Applications/Examples of results
A "non-contact tweezers" designed for high-temperature operation, which allows for the non-contact removal of wafers from a hot susceptor after epitaxial film formation on semiconductor wafers using a CVD apparatus. It features a handle equipped with a manual valve, enabling gas supply ON-OFF control through valve operation with a hand holding the handle, similar to using tweezers, while suspending and transporting the wafer by blowing gas to maintain a non-contact state.
Company information
Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.
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