Non-contact tweezers for protoss carriers
Non-contact tweezers for protos carriers
Non-contact tweezers for transferring wafers for protoss carriers without damaging them.
The non-contact tweezers for proto carriers remove or store thin wafers and warped wafers from or to the proto carrier without contact.
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basic information
The "Non-Contact Tweezers for Protos Carrier" are used to pick up or store ultra-thin wafers and warped wafers from or into a Protos carrier without contact. By blowing air, the internal area is made to have negative pressure through the ejector effect and Bernoulli effect according to the distance from the workpiece, and by creating positive pressure through the pressure chamber type air cushion effect and the cushioning effect of the airflow, it has the function of holding the substrate in a suspended state without contact. The non-contact transfer device "Float Chuck" at the tip of the handle allows for the ON-OFF control of air supply through the operation of the hand holding the handle, enabling the non-contact suction and detachment of the wafer.
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Applications/Examples of results
The 'Non-Contact Tweezers for Protos Carrier' are used to retrieve or store ultra-thin wafers and warped wafers from or into the Protos carrier without contact. The non-contact transport device 'Float Chuck' at the tip of the handle allows for the ON-OFF control of air supply through the operation of the hand holding the handle, enabling the non-contact suction and detachment of the wafer.
Company information
Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.