Developed a gas filter with a high filtration accuracy of 0.003 μm in a consistently stable state.
This is an inline ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. It is capable of high-temperature baking at 200°C to ensure the removal of impurities such as water and oxygen.
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basic information
Product Features - High filtration precision for particles of 0.003μm and above - Recommended flow rate: 10-200L/min - Lineup optimized for etching and thin film formation with ideal flow rates and high filtration precision - Cost reduction due to maintenance-free design - High corrosion resistance
Price information
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Delivery Time
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Applications/Examples of results
Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.
Line up（5）
| Model number | overview |
|---|---|
| PGF‐2‐＊＊＊＊ | Flow rate guideline 40–80SLM |
| PGF‐3‐＊＊＊＊ | Flow rate guideline 10–40SLM |
| PGF‐4‐＊＊＊＊ | Flow rate guideline 80–200SLM |
| PGF‐5‐＊＊＊＊ | Flow rate guideline 10–40SLM |
| Fittings available: VCR, Swagelok, UPG. Various sizes available: 1/4”, 3/8”, 1/2”, 3/4”. |
Company information
PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.