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  6. High filtration precision all-metal gas filter

High filtration precision all-metal gas filter

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UCS-M Series

last updated:Jun 20, 2012

ピー・ジェイ
ピー・ジェイ
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Compact size for handling higher gas flow.

This is a gas filter manufactured by Purelon Japan Co., Ltd. It uses SUS316L for all materials. It efficiently removes particles larger than 0.003μm even under high flow rates and high differential pressures. Compared to conventional products, it has extremely low pressure loss and can handle higher flow rates of gas in a compact size. We offer a wide range of options from low flow rates of about 10L/min to medium flow rates of about 250L/min.

    CVD EquipmentSemiconductor inspection/test equipmentGas Filters
UCS-Mシリーズ.jpg

High filtration precision all-metal gas filter

UCS-Mシリーズ.jpg
UCS-Mシリーズ.jpg

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basic information

【Features】 ○ The filtration precision is 0.003 μm. ○ The recommended flow rate is 15 to 250 L/min for various types. ○ The design pressure is 17 MPa (2,465 PSIG) at 20°C. ○ The maximum allowable differential pressure is 15 MPa (2,175 PSIG) at 20°C. ○ The maximum allowable temperature is 460°C. ● For more details, please contact us or refer to the catalog.

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Semiconductor manufacturing gas lines, gas cabinets, semiconductor manufacturing equipment, etc.

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ピー・ジェイ

ピー・ジェイ

Electronic Components and Semiconductors

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PJ Corporation was established as the general sales agent for Pureon Japan Co., Ltd. PJ Corporation will do its utmost to promote Pureon products worldwide. Products handled: 1. All products from Pureon Japan Co., Ltd. - Ceramic gas filters - Metal gas filters - Hastelloy gas filters - PTFE gas filters - Hybrid filters - Gas purifiers - Heaters - Liquid filters - Pressure sensors - Display devices - Temperature sensors - Differential pressure gauges - Resistivity meters - Digital flow control systems 2. Fluid control equipment parts for semiconductor manufacturing equipment and general industrial machinery.

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