Robust cold cathode ionization vacuum gauge
This is a cold cathode gauge controller that can measure pressures ranging from 4.0×10^-7 Pa to 3.0×10^-2 Pa in one range.
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basic information
(Features) - Robust cold cathode ionization vacuum gauge - Compact body allows for space-saving (Specifications) - Output signal: a) Photorelay output capacity DC24V, 0.5A b) Analog output 0-5V F.S. main impedance 1KΩ - Operating temperature and humidity: 5-40℃, up to 90% (without condensation) - Power supply: AC100V±10%, under 10VA (50/60Hz) *For more details, please inquire via request for materials or download.
Price information
List price: 172,000 (sensor and cable sold separately)
Price range
P3
Delivery Time
P4
Applications/Examples of results
- Vacuum deposition device - Optical thin film generation device - Accelerator and UHV research - Electronic device manufacturing equipment - Device manufacturing equipment for optoelectronics, etc.
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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.