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  6. Vibration isolation table for FA (Factory Automation)

Vibration isolation table for FA (Factory Automation)

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last updated:Feb 17, 2026

ワイヤード
ワイヤード
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Vibration isolation table for FA (Factory Automation)

The introduction of air spring-type vibration isolation devices, which have been difficult in the FA industry until now, has become possible. We have developed a rapid air supply and exhaust mechanism. Achieving a high takt time of 1.5 seconds for air ON and less than 1 second for OFF! It can be smoothly transitioned to a vibration isolation structure using a solenoid valve. (Air ON: 3mm lift: can be used in conjunction with lifting functions) Thanks to our uniquely developed mechanism, we have achieved a positional reproducibility of ±0.5mm: less than 0.1mm (ON: OFF) with high precision in the XYZ directions!

    Other processing machinesSemiconductor inspection/test equipmentMicroscope
HFシリーズ.jpg

Vibration isolation table for FA (Factory Automation)

HFシリーズ.jpg
HFシリーズ.jpg
  • Related Link - https://wired-co.jp/anti-vibration.html

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basic information

The introduction of air spring-type vibration isolation devices, which have been difficult in the FA industry until now, has become possible. We have developed a rapid air supply and exhaust mechanism. Achieving a high takt time of 1.5 seconds for air ON and less than 1 second for OFF! The system can be smoothly activated into a vibration isolation structure using an electromagnetic valve. (Air ON: 3mm lift: can be used in conjunction with lifting functions) Thanks to our uniquely developed mechanism, we have achieved a position reproducibility of ±0.5mm: less than 0.1mm (ON: OFF) with high precision in the XYZ directions!

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Applications/Examples of results

The lifting function can be used during measurement with vibration suppression, and after measurement, it can be used for handling by a robot.

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System desk type air spring vibration isolation table

System desk type air spring vibration isolation table

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ワイヤード

ワイヤード

Testing, Analysis and Measurement

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We propose to think together from the customer's perspective and to systematize our ideas. We prioritize after-sales support following your purchase. We aim to be a reliable company that accurately delivers precision, durability, price, and after-sales support. We believe that it is essential to develop new products while valuing customer feedback and continuously striving to create better offerings. We aim to be a company that, while never forgetting the feeling of gratitude, can be told, "I'm glad to have had a long relationship with you." We also sell optical components and automatic stages from companies such as Sigma Koki, Edmund Optics, Suruga Seiki, and Chuo Seiki.

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