Small Plasma Cleaner (Simple Sheet-Type Plasma Cleaner)
This device is a simple sheet-type plasma cleaner using parallel plate high-frequency plasma. It is a compact process device measuring 600mm (W) × 600mm (D) × 750mm (H) (excluding the pump).
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basic information
This device is a simple sheet-type plasma cleaner using parallel plate high-frequency plasma. It is a compact process device measuring 600mm (W) × 600mm (D) × 750mm (H) (excluding the pump).
Price information
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Delivery Time
Applications/Examples of results
Etching of wafer surfaces, ashing of photoresist, etc. Improvement of adhesion effects by removing inorganic substances from CSP, BGA/CSP substrates, lead frames, etc. Enhancement of underfill properties through surface modification of chips and substrates such as plastic packages, hybrid ICs, and polymer materials. Improvement of wire bonding properties by removing oxide films on electrode surfaces and inhibiting bonding.
Company information
Our company primarily engages in: 1. Sales and services of new equipment (plasma treatment equipment, wafer transporters (sorters), inspection equipment, etc.) 2. Sales and services of used semiconductor manufacturing equipment 3. Development, manufacturing, and consulting of equipment based on customer needs. Additionally, leveraging our network with companies both domestically and internationally, we accept inquiries regarding our customers' diverse needs, not limited to the semiconductor industry.