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  4. Semiconductor Manufacturing Equipment
  5. Electron beam lithography equipment
  6. Servo driver for voice coil motors (VCM)

Servo driver for voice coil motors (VCM)

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LPV220, ultra-precision positioning servo driver

last updated:Jun 05, 2008

サーボテクノ
サーボテクノ
  • Official site

We have developed a voice coil type linear motor (VCM) suitable for positioning with a movement distance of several tens of millimeters for high-speed movement and ultra-precise positioning.

1. Since there is no accumulation in the normal deviation counter, the command pulse and encoder pulse (tracking) match, and there is no phase delay between the command pattern and the tracking pattern. (Phase-Locked Loop) 2. The correlation of the two-axis driver can be traced accurately. 3. It demonstrates responsiveness even for minute feed rates. 4. Since it does not perform sampling control, it has a very fast response. 5. With a maximum of 4 MPPS and high speed, it can accommodate high-resolution encoders. 6. There is no switching noise.

    Electron beam lithography equipmentTorque ControlServo
LPV220.jpg

Servo driver for voice coil motors (VCM)

LPV220.jpg
LPV220.jpg

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basic information

The LPV series was developed to quickly position ultra-precision voice coil type linear motors (VCM). It achieves noiseless, high-speed response and linear torque control, enabling ultra-precise positioning at the nanometer level. Since it employs a linear amplifier, there is no dead zone in current, which is a drawback of PWM control, and the current resolution can also be made very high.

Price information

-

Delivery Time

P4

Applications/Examples of results

Voice coil type linear motor (VCM), XY stage, galvanometer mirror, and others. In particular, it is optimal for ultra-precision machines that require high-speed positioning (a few mSec) with minimal feed, positioning of linear motors using high-resolution linear scales of 0.01μm, and synchronized processing of position and speed.

Company information

サーボテクノ

サーボテクノ

Testing, Analysis and Measurement

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1. Positioning in nanometer units and ultra-precise speed control (PLL) using linear motors. 2. Development of a (real-time) encoder multiplier for achieving ultra-precise control, and a high-speed response servo driver supported by a linear amplifier. 3. Circuit design (including software) and PCB pattern design (CAD) are handled in-house, allowing for short delivery times even for OEM specifications.

Product/Service List (13)

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