Fully automatic carrierless wafer cleaning equipment
It is a carrierless cleaning device that allows for the extraction of wafers from the transport carrier and the cleaning of only the wafers.
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basic information
Can be manufactured with a variety of pharmaceutical specifications. We will also consider the device dimensions to match the installation space. Options such as carrier stock quantity, hot water heater, chemical supply unit, and concentration meter can be added.
Price information
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Delivery Time
Applications/Examples of results
Usage of chemical substances HF/APM/SPM/HPM/phosphoric acid/organic solvent systems, etc... Other chemicals can also be considered.
Company information
We strive to incorporate our customers' unique technologies and specifications into cleaning equipment in the most optimal way, utilizing the know-how that our staff has cultivated over many years, to turn it into a product.
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