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Pulse power supply

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Pulse power supply

last updated:Feb 14, 2019

栗田製作所 本社・京都事業部
栗田製作所 本社・京都事業部
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Achieving stable pulse discharge.

This is a pulse power supply optimal for pulsing bias power.

    CVD EquipmentPlasma Generatorpower supply
pp2.jpg

Pulse power supply

pp2.jpg
pp2.jpg
  • Related Link - http://pekuris.co.jp/product/category.php?c=1
  • Special site - Product/service details - https://pr.mono.ipros.com/pekuris/product/

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basic information

- Achieves high-speed rise and micro pulses - A wide range of specifications from low current to high current Custom specifications beyond standard options are also available. Please contact us.

Price information

It varies depending on the specifications, so please contact us.

Delivery Time

Please contact us for details

Applications/Examples of results

- Power supply for vacuum process equipment - Power supply for pulse bias - Power supply for target heating

Line up(10)

Model number overview
±2.5kV/1Ap/30kHz Output voltage: 0 to ±2.5kV, Output current: 0 to 1Ap, Output frequency: 100Hz to 30kHz, Pulse width: 1 to 4μs, Cooling method: Forced cooling by built-in fan, Protection features: Overcurrent protection circuit, Overtemperature protection circuit, Fuse disconnection detection circuit, Rise time: Less than 1μs (resistive load -3kV/10Ap), Dimensions: 199W×450D×378H, Weight: 19kg
±5kV/7Ap/60kHz Output voltage adjustment method: Slide regulator method, Maximum output voltage: 0 to ±5kV, Maximum output current: 0 to 7Ap, Output frequency: 1kHz to 60kHz, Pulse width: 1μs to 10μs, Operating mode: Continuous/Burst, Display: DC voltage, ammeter, output frequency display, Cooling method: Forced air cooling by built-in fan, Protection features: Overcurrent protection circuit, Overtemperature protection circuit, Fuse disconnection detection circuit, Size: 480W×249H×520D, Weight: 170kg
±7kV/1Ap/30kHz Output voltage: 0 to ±7kV, Output current: 0 to 1Ap, Output frequency: 100Hz to 30kHz, Pulse width: 1 to 4μs, Cooling method: Forced cooling by built-in fan, Protection features: Overcurrent protection circuit, Overtemperature protection circuit, Fuse disconnection detection circuit, Rise time: Less than 1μs (resistive load -3kV/10Ap), Dimensions: 199W×450D×378H, Weight: 19kg
±10kV/3Ap/60kHz Output voltage adjustment method: Slide regulator method, Maximum output voltage: 0 to ±10kV, Maximum output current: 0 to 3Ap, Output frequency: 1kHz to 60kHz, Pulse width: 1μs to 10μs, Operating mode: Continuous/Burst, Display: DC voltage, ammeter/output frequency display, Cooling method: Forced air cooling by built-in fan, Protection features: Overcurrent protection circuit, Overtemperature protection circuit, Fuse disconnection detection circuit, Size (mm): 480W×249H×520D, Weight: 17kg
±300V/30Ap/90kHz Input voltage: 0 to +300V, Output voltage: 0 to ±300Vp, Output current: 0 to 30Ap, Oscillation frequency: 30Hz to 90kHz, Pulse width: 1μs to 4μs, Display: Output frequency display, Cooling method: Forced air cooling by built-in fan, Protection features: Overcurrent protection circuit, Overtemperature protection circuit, Fuse disconnection detection circuit, Interface: Local/Remote switching, Size (mm): 480W×249H×500D, Weight: 25kg or less
±1kV/40Ap/50kHz Input voltage: 0 to -1kV, Output voltage: 0 to -1.2kV, Output current: Pulse mode 0 to -40Ap, DC mode 0 to -10ADC, Output frequency: 125Hz to 50kHz, Pulse width: 1μs to DC (continuous), Display: Output frequency display, Cooling method: Forced air cooling by built-in fan, Protection features: Overcurrent protection circuit, Overtemperature protection circuit, Interface: Local/Remote switching, Size (mm): 480W×349H×600D, Weight: 45kg
PVP-02V50A Output voltage: 0V to -200V, Output current: 0Ap to -50Ap, Repetition frequency: 0pps to 50kpps, Pulse width: 1μs to 20μs, DC power capacity: -200V/40A/8kW, Receiving capacity: 12kVA, Protection features: Overcurrent protection circuit, Overtemperature protection circuit, Fuse disconnection detection circuit, Device used: IGBT, Dimensions (mm): 570W×1100H×620D
PVP-1KV10A Output voltage: 0V to -1000V, Output current: 0Ap to -10Ap, Repetition frequency: 0pps to 30kpps, Pulse width: 1μs to 20μs, DC power capacity: -1kV/40A/8kW, Receiving capacity: 2kVA, Protection features: Overcurrent protection circuit, Overtemperature protection circuit, Fuse disconnection detection circuit, Device used: IGBT, Dimensions (mm): 570W×1100H×620D
PVP-1KV1KA Output voltage: 0V to -1000V, Output current: 0Ap to -1000Ap, Repetition frequency: 0pps to 4kpps, Pulse width: 1μs to 200μs, DC power capacity: -1kV/40A/8kW, Receiving capacity: 7kVA, Protection features: Overcurrent protection circuit, Overtemperature protection circuit, Fuse disconnection detection circuit, Device used: IGBT, Dimensions (mm): 570W×1100H×620D
PVP-3KV10A Output voltage: 0V to -3000V, Output current: 0Ap to -10Ap, Repetition frequency: 0pps to 40kpps, Pulse width: 5μs to 20μs, DC power capacity: -3kV/0.3A/900W, Receiving capacity: 2kVA, Protection features: Overcurrent protection circuit, Overtemperature protection circuit, Fuse disconnection detection circuit, Device used: IGBT, Dimensions (mm): 570W×1100H×620D

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Kurita Manufacturing Co., Ltd. Company Profile

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栗田製作所

栗田製作所 本社・京都事業部

Industrial Electrical Equipment

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By applying the pulse power technology we have cultivated over many years, we will surely meet your company's needs with the development of various newly developed plasma control power supplies and surface treatment equipment.

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