List of Semiconductor Manufacturing Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

A device that performs a series of processes from slit coating to vacuum lamination.

• Other assembly machines
• Bonding Equipment

Slit coater compatible with not only flat surfaces but also curved surfaces.

• Coater

Eliminate the cause of bubbles from the source! Control dissolved oxygen to a level of 10 ppb just by retrofitting existing processes!

• Other semiconductor manufacturing equipment
• Water treatment equipment
• Deaeration device

RP3500SA N2 Purge System Standalone

• Other semiconductor manufacturing equipment

Achieving high-density plasma with a simple mechanism. Compatible with substrates from wafers to 1 m². Damage-free etching of Si-based materials, metals, organic films, and various thin films.

• Etching Equipment
• Ashing device
• Plasma surface treatment equipment

Please consult us for precision grinding and coating for plate shapes!

• Wafer processing/polishing equipment
• Processing Contract

The era has shifted from Y2O3 to YOF! Significantly reduced aging time for etching equipment, decreased particles, greatly increased equipment operating time, and improved productivity!

• Etching Equipment
• Processing Contract
• Surface treatment contract service

Far superior in corrosion resistance and plasma resistance compared to protective films created by thermal spraying or aerosol deposition! Yttrium oxide produced by a unique ion-assisted deposition me...

• Surface treatment contract service
• Etching Equipment
• Processing Contract

Significantly improved semiconductor yield and equipment operating time with ultra-dense thick film formation using ion assist deposition method! Ideal for protective films and regeneration of dry etc...

• Surface treatment contract service
• Processing Contract
• Etching Equipment

Achieving high-precision grinding! Equipped with multi-stage steps, capable of handling complex grinding recipes.

• Wafer processing/polishing equipment
• Other processing machines

Stationary type with a high-rigidity body! Capable of maintaining ultra-precise accuracy and stable processing.

• Wafer processing/polishing equipment
• Other processing machines

Improvement of work parallelism! It is possible to de-bubble air and other contaminants that were mixed in during wafer attachment.

• Wafer processing/polishing equipment
• others

Compatible with φ8" to φ12" wafers! In-situ pad conditioning is possible during CMP processing.

• Wafer processing/polishing equipment
• Other processing machines

Customization for each customer is supported! Additional features can be added even after the equipment has been installed.

• Wafer processing/polishing equipment
• Other processing machines

Flow path design to achieve uniform cooling

• Other semiconductor manufacturing equipment
• Cooling system