List of Semiconductor Manufacturing Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

3D Inspection Device HISR - Assisting with precise inspection and verification.

• Color camera
• Other semiconductor manufacturing equipment

We have achievements such as 'sputtering equipment with GB for organic EL' and 'IBS equipment for research and development'!

• Sputtering Equipment

We have a track record of equipment such as 'plasma CVD systems for metal containers' and 'ICP-type MOCVD systems'!

• CVD Equipment

Supports tray transport! Achieves excellent substrate temperature distribution and gas flow method.

• Annealing furnace
• Heating device

Switching between RIE mode and DP mode is possible! Reduction of metal contamination through special surface treatment.

• Etching Equipment

Reduction of particles through suitable surface treatment! Compatible with high vacuum processes using a load-lock system.

• Evaporation Equipment

We have a track record of devices such as the "two-stage composite Pt deposition system"! Please contact us when you need assistance.

• Evaporation Equipment

You can freely choose from the plasma cleaning chamber, organic deposition chamber, electrode deposition chamber, sealing chamber, and more!

• Evaporation Equipment

Maximum substrate heating temperature of 1000℃! Reduces element loss specific to the substrate surface heating process!

• Heating device
• Annealing furnace

It is a versatile and compact device that enables etching, ashing, and ion cleaning!

• Etching Equipment
• Ashing device

Demo units available for loan! Ideal for spin drying silicon wafers, masks, and film substrates!

• Other clean room equipment and facilities
• Other semiconductor manufacturing equipment

Demo units available for loan! This is a cassette-type batch cleaning device that can accommodate up to Φ300.

• Other semiconductor manufacturing equipment

Demo units available for loan! This is a sheet-type cleaning device that can accommodate up to Φ300.

• Other semiconductor manufacturing equipment

Demo units available for loan! This is a device that performs a series of cleaning and etching processes, including pure water treatment and drying.

• Etching Equipment

【Demo unit available for loan!】A semi-automatic device that transports wafers from the processing tank to the rinse tank via an arc.

• Etching Equipment