List of Actuator products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

We can accommodate high resistance over 10,000 ohms, with diameters ranging from approximately 30 mm to 8 inches, and we also offer thinning and chip processing arrangements!

• Other semiconductors
• Processing Contract
• Wafer

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Compact XYZ piezo stage with 100 µm × 3-axis for supporting nanoscale position control.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

Smooth and high-speed response even under high load of 600N with linear motor × high-precision encoder.

• Linear motor
• Actuator
• Cartesian Robot

Flexible combination of axis configuration and specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

High-resolution piezo actuator for achieving nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

Compact actuator with high holding force, ideal for fine adjustment of mirrors and optical elements.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Long-term stabilization of microscope focus with inertial drive and position feedback.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

High-speed mirror stage for precise control of laser beams.

• Actuator
• Solenoid Actuators
• Optical Experimental Parts

A large-angle drive stage optimal for beam control in optical communication and optical systems.

• Actuator
• Solenoid Actuators
• Optical Experimental Parts

Compact linear stage with a size of 60mm square, compatible with XYZ axes.

• Actuator
• Cartesian Robot
• encoder

Compact linear stage compatible with XYZ axis, size 60mm square.

• Actuator
• Cartesian Robot
• encoder

Compact linear stage suitable for micromanipulation.

• Linear motor
• Actuator
• Piezoelectric Devices

Height 14 mm, φ36 mm opening, ideal for fine adjustment of optical systems.

• Actuator
• Other industrial robots
• encoder

Thin type with a height of 14 mm, an opening of φ36 mm, ideal for microscope scanning.

• Actuator
• Other industrial robots
• encoder

High-precision positioning stage ideal for laser cutting and laser processing.

• Actuator
• Cartesian Robot
• encoder

Provides sub-nanometer resolution. 0.1nm resolution and high linearity vertical positioning.

• Actuator
• Piezoelectric Devices
• encoder

For fine position correction of semiconductor devices. 100 µm × 3-axis nanopositioner.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

A multi-axis motion system that can be freely configured with the number of axes and specifications according to the application.

• Linear motor
• Actuator
• Cartesian Robot

High-precision multi-axis system corresponding to the XY+Z configuration. Optimal configuration can be achieved according to the application.

• Linear motor
• Actuator
• Cartesian Robot

High-resolution piezo actuators that achieve nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

High-thrust piezo actuators that achieve nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

High-thrust piezo actuators that achieve nano-level positioning.

• Actuator
• Piezoelectric Devices
• encoder

Long-distance nanopositioning PiezoWalk® drive. High resolution and compact design.

• Actuator
• Linear motor
• Piezoelectric Devices

Achieving a holding force of up to 800N and a resolution of 5nm. High-thrust piezo drive supporting high-precision positioning in semiconductor manufacturing equipment.

• Actuator
• Piezoelectric Devices
• Other machine elements

Precise control of microscope focus with a maximum stroke of 13 mm.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Long-term stable optical fine-tuning with inertial drive and position feedback.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

Slim and high precision. Enhancing the positioning accuracy in semiconductor manufacturing.

• Actuator
• Other industrial robots
• encoder

Thin and high-precision air bearing rotation stage, ideal for optical system adjustments.

• Actuator
• Other industrial robots
• encoder

For positioning samples in a microscope. High precision, space-saving, self-locking.

• Linear motor
• Piezoelectric Devices
• Actuator

Size 50x50x19mm, infinite rotation, maximum 720°/s, self-locking when power is off.

• Actuator
• Other industrial robots
• encoder

A photonics solution that significantly reduces alignment time with high-speed 6-degree-of-freedom control.

• Optical Experimental Parts
• Other industrial robots
• Actuator

Ideal for precise positioning in optical systems. Compact high-precision linear stage with a width of 60mm and a maximum stroke of 200mm.

• Actuator
• Cartesian Robot
• encoder

Flatness of 5 nm, resolution of 0.3 nm, achieving high-speed and high-precision operation with an XY-axis piezo scanner.

• Actuator
• Piezoelectric Devices
• encoder

High resolution for static and dynamic applications. With preload piezo actuator (HVPZT) sensor option.

• Actuator
• Piezoelectric Devices
• encoder

Precision positioning at the nano level with a 66 mm opening × maximum 300 µm on the XYZ axis.

• Actuator
• Piezoelectric Devices
• Cartesian Robot

The nano-level motion amount is 100µm and 200µm on the Z-axis, with chip tilt axes of 1mrad and 2mrad, and is optimal for transmitted light with a 66mm aperture.

• Actuator
• Piezoelectric Devices
• encoder

PiezoWalk(R) drive for long-distance nanopositioning. Compact with a stroke of up to 5mm, high resolution, and a generated force of up to 40N.

• Actuator
• Linear motor
• Piezoelectric Devices

Compact and high-speed PiezoWalk(R) drive. Standard stroke of 20mm! Compact and cost-effective design.

• Actuator

0.2nm resolution, ultra-compact 44mm cube. Achieves high-speed scanning and high-precision XYZ nanopositioning.

• Actuator
• Other machine elements

Achieve reliable operation while minimizing friction! Usable in micro-manufacturing, medical technology, and tool control!

• Actuator
• Other industrial robots
• encoder

Compact XYZ piezo stage with 40mm size and 100µm operation on the XYZ axis.

• Actuator
• Cartesian Robot
• Piezoelectric Devices

High-load piezo actuator (HVPZT) with preload sensor option.

• Actuator
• Piezoelectric Devices
• encoder

Type with a stroke of 50 to 1800 µm, high-resolution operation with capacitive sensors.

• Actuator
• Piezoelectric Devices
• encoder