List of Vacuum Equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

EPDM suction pads for semiconductors have been released!

• Vacuum Equipment

We provide overhauling services from roughing pumps to ultra-high vacuum pumps.

• Vacuum pump
• Calibration and repair
• Vacuum Equipment

Introducing vacuum pumps for large displacement and high vacuum applications.

• Vacuum pump
• Vacuum Equipment

Energy-saving with pumps, installing high vacuum equipment in a quiet and comfortable environment.

• Vacuum Equipment
• Other process controls
• Vacuum pump

We have reduced the running costs to less than half of the conventional amount. Additionally, thanks to the patented structure, it has become possible to handle water vapor as well.

• Vacuum pump
• Other pumps
• Vacuum Equipment

Measurement is possible from atmospheric pressure to ultra-high vacuum! It is a wide-band vacuum gauge.

• Vacuum Equipment
• Other measurement, recording and measuring instruments
• Other inspection equipment and devices

Oil-free, compact design, high-performance dry pump.

• Vacuum pump
• Vacuum Equipment
• Other pumps

Equipped with a full-wing rotating wing, suitable for ultra-high vacuum. For electron microscope inspection and semiconductor applications.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment

An industrial dry pump equipped with the latest technology, based on experience and achievements in semiconductor processes.

• Vacuum pump
• Vacuum Equipment
• Other pumps

Rich in variety and sturdy! Low vibration and low noise! Achieves excellent vacuum levels!

• Vacuum pump
• Vacuum Equipment
• Other pumps

Adopts magnetic bearing control method! A control unit integrated design that achieves space-saving and low vibration.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment

This is the mini UHV gate valve from VAT, the world standard for vacuum valves.

• Vacuum Equipment
• valve

Introduction of various ISO-KF standard vacuum piping components.

• Vacuum Equipment
• Sealing
• Pipe Fittings

Long hours of stable operation, clean exhaust without the use of hydrocarbons. Ideal for electron microscope inspection and semiconductor applications.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment

It is a compact turbo molecular pump that is oil-free and maintenance-free.

• Vacuum pump
• Turbo Pump
• Vacuum Equipment