List of Sputtering Equipment products

  • classification:Sputtering Equipment

31~45 item / All 215 items

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Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

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  • air conditioning

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From design to after-service of the equipment! We can offer various equipment proposals.

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  • Sputtering Equipment

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Support for the entire lifecycle from device design to after-sales service!

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  • Sputtering Equipment
  • Plasma surface treatment equipment

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Under the management philosophy of 'pursuing customer satisfaction and technical expertise to the utmost and contributing to society,' we develop our business.

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  • Vacuum Equipment
  • Evaporation Equipment
  • Sputtering Equipment

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High-performance, cost-effective RF/DC magnetron sputtering device for research and development.

  • Other semiconductor manufacturing equipment
  • Sputtering Equipment

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4-Yen Multi-Sputtering Device 【MiniLab-S060】

4 cathodes with Φ2 inch configuration Simultaneous film deposition: 3-component simultaneous deposition (RF 500W or DC 850W) + HiPIMS (PulseDC 5KW) x 1 Power distribution and configuration settings for 4 cathodes can be freely changed via the HMI screen using the plasma relay switch 3 MFC systems (Ar, O2, N2) for reactive sputtering RIE etching stage RF 300W (main chamber) + <30W soft etching (LL chamber) Substrate heating: Max 500℃, 800℃, or 1000℃ (C/C or SiC coating) Substrate rotation and vertical movement (automatically controlled by stepping motor) APC automatic control: Upstream (MFC flow adjustment) or downstream (automatic valve opening adjustment on the exhaust side) Dimensions: 1,120(W) x 800(D) ● Mixed specifications for resistance heating deposition, organic material deposition, EB deposition, PECVD, etc. are also possible.

From site surveys to design and construction, experienced engineers will handle it!

  • Other electronic parts
  • Sputtering Equipment

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A film deposition platform for semiconductor wafers and advanced packaging capable of various film deposition treatments.

  • Sputtering Equipment
  • Etching Equipment
  • CVD Equipment

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Providing mass production solutions for high-speed and flexible substrate film deposition applications!

  • Sputtering Equipment
  • Etching Equipment

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Meeting the high cleanliness standards required in the semiconductor and medical device fields. We carry out everything from precision cleaning to packaging and assembly in a consistent clean environm...

  • CVD Equipment
  • Sputtering Equipment
  • Resist Device

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Flexibility, compact design, and low investment costs! An ideal choice for small-scale production.

  • Sputtering Equipment
  • Etching Equipment

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Extremely low Rc system design in the industry and the highest level of inter-wafer reproducibility!

  • Sputtering Equipment
  • Etching Equipment

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Higher productivity for PLP! More process possibilities. Optimized for advanced packaging.

  • Sputtering Equipment
  • Etching Equipment

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We have achievements such as 'sputtering equipment with GB for organic EL' and 'IBS equipment for research and development'!

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  • Sputtering Equipment

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Achieving a substrate temperature of 900℃! Equipped with a 3-axis mechanism on the substrate stage to realize a uniform film thickness distribution.

  • Sputtering Equipment

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For semiconductors, MEMS, electronic components, etc.! High-speed and stable continuous film deposition is possible from single crystal epitaxial buffer layers to piezoelectric films!

  • Sputtering Equipment

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For semiconductors, MEMS, electronic components, etc.! High-speed and stable continuous film deposition is possible from single crystal epitaxial buffer layers to piezoelectric films!

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  • Sputtering Equipment

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