List of Ashing device products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

Dry etching equipment, reactive ion etching equipment, compact etcher, ashing equipment, cleaner (cleaning equipment)

• Etching Equipment
• Ashing device
• Other semiconductor manufacturing equipment

Cleaning equipment, UV/O3 cleaning equipment, dry cleaning equipment, cleaner (cleaning device), stripper (stripping device)

• Ozone Generator
• Ashing device
• Other semiconductor manufacturing equipment

Supports automated mass production lines. Inline type, sheet type, and various types with flexible hardware configurations, all with a proven track record of high effectiveness of vacuum plasma in mas...

• Plasma surface treatment equipment
• Etching Equipment
• Ashing device

We protect the environment with dry cleaning plasma technology and significantly improve the productivity of semiconductor devices.

• Etching Equipment
• Ashing device
• Other semiconductor manufacturing equipment

A plasma cleaning device with extensive experience in removing DLC films from aspherical lenses. An essential dry film removal device for the repair of high-value-added molds.

• Etching Equipment
• Ashing device
• Plasma surface treatment equipment

Damage-free, high throughput, multi-purpose compatible high-end devices, compound semiconductors, and MEMS. Extensive track record and comprehensive support. New type now available.

• Ashing device
• Etching Equipment
• Plasma surface treatment equipment

Carefully responding to niche demands. Light etching and ashing for thin wafers and double-sided processing, compact type CtC etching equipment.

• Etching Equipment
• Ashing device
• Plasma surface treatment equipment

Damage-free, high rate, large area compatible, complete removal of ion damage, achieving complete radical processing. High-performance plasma ashing device.

• Ashing device

"Plami-α" is a compact and user-friendly atmospheric pressure plasma generation device. It can be easily used for surface modification and activation anytime, anywhere!

• Plasma surface treatment equipment
• Ashing device
• others

"TSP" protects the line from product defects caused by instantaneous voltage drops and damages from equipment failures.

• CMP Equipment
• Ashing device
• Ion implantation equipment

"TSP" protects the line from product defects caused by instantaneous voltage drops and damages from equipment failures.

• CMP Equipment
• Ashing device
• Ion implantation equipment

"TSP" protects the line from product defects caused by instantaneous voltage drops and damages from equipment failures.

• CMP Equipment
• Ashing device
• Ion implantation equipment

"TSP" protects the line from product defects caused by instantaneous voltage drops and damages from equipment failures.

• CMP Equipment
• Ashing device
• Ion implantation equipment

"TSP" protects the line from product defects caused by instantaneous voltage drops and damages from equipment failures.

• CMP Equipment
• Ashing device
• Ion implantation equipment

"TSP" protects the line from product defects caused by instantaneous voltage drops and damages from equipment failures.

• CMP Equipment
• Ashing device
• Ion implantation equipment