List of Semiconductor inspection/test equipment products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

It is a device that performs macro inspection of wafers and micro inspection using a microscope.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device for surface inspection of wafers after polishing.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device for visually inspecting the edges of φ300 mm silicon wafers (chip and chipping inspection).

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

Pass/Fail Judgment Device

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

A device capable of performing three types of operations.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device for drying 300mm wafers that have been cleaned after double-sided polishing.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device for simple cleaning (brush + water) of φ300 mm silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

Loading and unloading of φ150 mm and φ125 mm silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device for storing φ300 mm wafers, which have completed processing, one by one into a Teflon cassette for submersion.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

It is a device that loads wafers one by one.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device used for handling to perform P/N determination and visual inspection of silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

It is a device for inverting and transferring silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

Classified by resistivity and thickness categories.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device that detects the wafer edge using laser light and measures the diameter by comparing it with a calibration wafer (reference wafer).

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device that detects the edge of a wafer and measures its diameter through image processing.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment