Tabletop UV irradiation device MUV
A tabletop UV irradiation device that enables advanced cleaning without damaging the sample.
Supports the processing of large substrates. A tabletop UV irradiation device that enables advanced cleaning without damaging the samples. 【Features】 ○ UV irradiation can be performed on substrates (samples) such as silicon wafers and glass with a maximum diameter of 300mm, removing organic substances from the surface and improving wettability. ○ The holder for the substrates (samples) can be easily adjusted or replaced, allowing for the processing of thicker substrates (samples). ○ The ozone-generating device can achieve high cleaning effects by combining treatment with ozone. ○ Automatic operation is possible after setting the substrates (samples). ○ Despite being a tabletop model, it can process large substrates, making it ideal for the development of treatment processes such as surface modification and wafer cleaning. ○ Unlike wet cleaning, it does not produce waste liquid and achieves advanced cleaning effects without causing physical damage to the samples. ○ Organic contaminants are gasified and expelled, preventing re-adhesion of organic contaminants. ● For other functions and details, please download the catalog.
- Company：メープル
- Price：Other
