Large Solvent Recovery System for Semiconductor Manufacturing (Continuous Type)
Continuous cleaning solution regeneration in semiconductor manufacturing sites.
In the semiconductor manufacturing industry, the regeneration and reuse of spent cleaning solutions in precise cleaning processes are emphasized from the perspective of cost reduction and environmental impact reduction. In particular, maintaining the quality of cleaning solutions and ensuring a stable supply are directly linked to product yield, necessitating a highly reliable regeneration process. Our "Large Solvent Recovery Unit CA-800 Series" is suitable for processing waste solvent emissions of over 1 ton per month and supports the stable regeneration of cleaning solutions. If the boiling point of the solvent to be recovered is approximately 250°C or lower, installation and solvent recovery can be performed regardless of whether it is in a non-explosion-proof area or an explosion-proof area. 【Usage Scenarios】 - Regeneration of cleaning solutions in semiconductor manufacturing processes - Reduction of waste solvent emissions - Stable supply of cleaning solutions 【Benefits of Implementation】 - Reduction in cleaning solution purchase costs - Reduction in waste solvent treatment costs - Reduction in environmental impact
- Company:コーベックス
- Price:Other