Exhibits stable high performance even with repeated long-duration door opening and closing operations! Excellent durability of the load port.
The "TAS300" is a standard load port designed to automatically open and close FOUPs (Front Opening Unified Pods) used in semiconductor manufacturing processes, and is installed on various semiconductor manufacturing equipment.
It boasts top-class performance in terms of low particle generation, high throughput, and durability for repeated operations, which are required by semiconductor manufacturing equipment.
All moving parts, including the mapping unit, are located below the wafer surface, achieving a high level of particle-free operation through thorough airflow analysis.
【Features】
■ Reliable opening and closing of a wide variety of FOUPs without individual adjustments
■ Optional installation of a mapping unit (transmissive sensor)
■ Excellent durability that maintains stable high performance even after prolonged repeated door opening and closing
■ Equipped with an obstacle detection function during FOUP docking
■ Equipped with a FOUP presence detection function and normal placement detection function when FOUP is loaded
■ A positioning mechanism is installed on the BOLTS surface to reduce the time for load port attachment and detachment
*For more details, please refer to the PDF document or feel free to contact us.
