Nanomotion's ultrasonic motor achieves high-precision positioning, high-speed movement, and fine motion all in one. Custom-made options are also available to suit your equipment.
We design and manufacture high-speed movement, precise positioning, and vacuum-compatible stages using ultrasonic motors for applications such as prototyping and small-lot production for development purposes. Nanomotion's ultrasonic motors feature direct drive with no backlash. They can be used not only in the atmosphere but also in high vacuum, and non-magnetic models are available for MRI and ion beam applications.
■ Stage for Light Sheet Microscopy
Achieves accuracy with a precision of 10nm and excellent speed uniformity. 5-axis with XYZ and Tip-Tilt.
■ 1nm Multi-Axis Precision Stage for Semiconductor Manufacturing Evaluation
A 3-axis stage used within a vacuum chamber that has sub-nanometer step resolution using SE motors. Manufactured for semiconductor 7nm process development.
■ Multi-Axis Platform for Laser Communication for Low Earth Orbit Satellites
Cancels the constant vibrations of satellites using ultrasonic motor stages, enabling laser communication with Earth.
*For other examples, please refer to the "Examples of Achievements" section below.
Additionally, Nanomotion's ultrasonic motors can be widely used in medical devices, spectrometers, optical alignment, analytical instruments, and more. We assist with prototyping and development.
