1nm Feedback Stage FS-1040SPX(MD)/XY
"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position retention after positioning!
This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a resolution of "1nm" and a stroke of "40mm." Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1040SPX(MD) and the high-speed type is FS-1040UPX. (*1) In combination with the feedback stage controller FC-911.
- Company:シグマ光機
- Price:Other