Submicron Feedback Stage FS-1100X/XY
100mm stroke long-stroke and high-resolution positioning stage
This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage, reducing detection errors. Since the position is detected by the encoder and feedback control is performed, it excels in resolution, position reproducibility, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm', and when combined with FC-111, it operates with a resolution of '100nm', with a stroke range of '100mm'.
- Company:シグマ光機
- Price:Other