High-load linear stage for wafer processing and inspection in semiconductor manufacturing.
Smooth and high-speed response even under high load of 600N (maximum) with linear motor × encoder.
In the semiconductor manufacturing industry, high precision and stability are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, even slight misalignment in positioning can significantly affect product quality. The V-817 provides high-precision positioning and long-term stability, contributing to yield improvement. 【Application Scenarios】 - Wafer processing - Precision inspection - Laser processing 【Benefits of Implementation】 - Positioning reproducibility at the 2 µm level - Dust reduction through non-contact drive - Achievement of long-term stability
- Company:PI Japan
- Price:Other