Stable slurry supply in semiconductor manufacturing! Application case studies.
Achieving stable slurry supply! GEMU slurry supply application case for semiconductor manufacturing.
In the supply of CMP slurry, disturbances in the flow within the supply loop can lead to the agglomeration of the slurry. To ensure that particles in the CMP slurry are evenly dispersed, the CMP tool filter is connected upstream to remove coarse particles. The flow optimization design of the GEMÜ valve block reduces the agglomeration of the medium relatively. This extends the lifespan of the filter, increases the replacement intervals, and leads to cost savings. The compatible product range of the GEMÜ PC50 iComLine multi-port valve block The advantage of the POU (Point of Use) box is its compactness, allowing it to be integrated into the intermediate layer of the system. This saves space within the cleanroom. Furthermore, the flow optimization design of the block helps prevent agglomeration of the medium. Depending on the structure of the system, various customization options are available.
- Company:ゲミュージャパン
- Price:Other