[Analysis Case] Electric Field Analysis of MEMS Electrostatic Actuators (Electrostatic Force)
Consideration of whether the order of the electrostatic force obtained as a result of the analysis is reasonable! A case study applying electric field analysis.
Here is an example of electric field analysis for a comb-type electrostatic actuator. Electrostatic actuators generate electrostatic force based on the sign of the charges present on opposing electrodes, so electric field analysis is applied. In "PHOTO-VOLT," it is possible to calculate the potential distribution, electric field distribution, and the electrostatic force acting on the electrodes. Additionally, we consider whether the order of the electrostatic force obtained from the analysis results is reasonable. For more details, please refer to the related links below. 【Case Overview】 ■ Software Used: PHOTO-VOLT ■ Analysis Results ・Electrostatic Force (per unit length): 0.792[N] *For more details, please refer to the related links or feel free to contact us.
- Company:フォトン
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