Feedback Stage×シグマ光機 - List of Manufacturers, Suppliers, Companies and Products

Submicron Feedback Stage FS-1050X/XY

"Precision positioning device" with high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-411 or FC-111.

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Submicron Feedback Stage FS-1100X/XY

100mm stroke long-stroke and high-resolution positioning stage

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage, reducing detection errors. Since the position is detected by the encoder and feedback control is performed, it excels in resolution, position reproducibility, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm', and when combined with FC-111, it operates with a resolution of '100nm', with a stroke range of '100mm'.

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Micro Rotation Feedback Stage FS-1120θ

"Precision positioning device" - A positioning stage for feedback micro-rotation of '0.00005°' or '0.0001°'!

This is a positioning stage for minute rotations with a stroke of '±4°' that incorporates an optical encoder. It allows for feedback control with a minimum step increment of '0.00005°' (*1) or '0.0001°' (*2). Thanks to our proprietary feedback control circuit, it features high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-401 (*2) Combination with feedback stage controller FC-101

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5nm Feedback Stage FS-1040SPX/XY

Precision positioning device with an integrated linear encoder, operating with a resolution of 5nm.

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 40mm with a resolution of 5nm (*1). Due to the combination of our self-developed linear scale and our unique feedback control circuit, it performs full closed-loop control, ensuring high resolution, high positioning reproducibility, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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5nm Feedback Stage FS-1050SPX/XY

"Precision positioning device" with 5nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 5nm (*1). Thanks to our proprietary linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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10nm Feedback Stage FS-1100PX/XY

Built-in encoder, 10nm resolution, high positioning repeatability, and excellent position retention after positioning stage!

An optical linear encoder is built into the center of the stage to reduce position detection errors, and by feeding back position information to the controller, it achieves high resolution, high positioning repeatability, and position holding capability after positioning. The stroke is '100mm' with a resolution of '10nm' (*1). Due to the long operating range, both movement and positioning can be performed with this single stage. (*1) In combination with the feedback stage controller FC-511.

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Vacuum-compatible 1nm feedback stage FS-1020UPX(V)

【Usable in a vacuum】High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be used inside a vacuum chamber. Due to the built-in linear encoder, it has high-precision repeat positioning performance through closed-loop control.

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Vacuum-compatible 1nm feedback stage FS-1050UPX(V)

[Vacuum Compatible] High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control, possessing characteristics equivalent to those for atmospheric use.

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How to Choose a Feedback Stage (Positioning)

Optical linear scale! A system for positioning with nanometer resolution.

Feedback refers to a system that monitors position information from a linear scale through closed-loop control to improve the reproducibility of positioning. The feedback stage system is composed of a linear scale, a stage, and a controller. The selection guide introduces methods for selecting stages based on three points: "operating type," "resolution," and "stroke," tailored to the customer's specifications. 【Features of the Feedback Stage Controller】 - Full closed-loop control - Built-in motor driver - Various error detection functions - Communication via RS-232C standard / GPIB For more details, please contact us or download the catalog.

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1nm Feedback Stage FS-1020SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position holding stability after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 20mm with a resolution of 1nm (*1). Thanks to our self-developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1020SPX(MD) and the high-speed type is FS-1020UPX. (*1) In combination with the feedback stage controller FC-911.

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1nm Feedback Stage FS-1040SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a resolution of "1nm" and a stroke of "40mm." Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1040SPX(MD) and the high-speed type is FS-1040UPX. (*1) In combination with the feedback stage controller FC-911.

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10nm Feedback Stage FS-3150X/XY

"Precision positioning device" with high resolution, excellent positioning reproducibility, and strong position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 150mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

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10nm Feedback Stage FS-3200X/XY

"Precision positioning device" with high resolution, excellent positioning repeatability, and strong position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controller FC-514.

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Vacuum-compatible 10nm feedback stage, lifting type

Vacuum-compatible positioning stage for the Z-axis with a built-in linear encoder and 10nm resolution.

This is a high-resolution Z-axis positioning stage equipped with an optical linear encoder. It offers a resolution of 10nm with stroke options of 5mm or 10mm. It has been designed to mitigate outgassing, making it usable in a vacuum. The structure minimizes changes in the tilt of the table surface, and with our proprietary linear encoder and unique feedback control circuit, it provides high resolution, excellent positioning repeatability, and position retention after positioning.

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Vacuum-compatible 10nm feedback stage, micro-rotation type

Micro-rotation stage with an encoder that operates with a minimum resolution of 0.00001° and ±4° in vacuum conditions.

This is a high-resolution micro-rotation stage equipped with an optical linear encoder. It has a resolution of 0.00001° and a stroke of ±4°. It has been treated for outgassing and can be used in a vacuum. It is suitable for adjusting the rotation direction.

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Feedback Stage×シグマ光機 - List of Manufacturers, Suppliers, Companies and Products

Feedback Stage Product List