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Feedback Stage - List of Manufacturers, Suppliers, Companies and Products

Feedback Stage Product List

31～37 item / All 37 items

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10nm Feedback Stage FS-3200X/XY

10nm Feedback Stage FS-3200X/XY

"Precision positioning device" with high resolution, excellent positioning repeatability, and strong position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controller FC-514.

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Vacuum-compatible 5nm feedback stage, 50mm operation.

Vacuum-compatible 5nm feedback stage, 50mm operation.

High-performance positioning stage with 5nm resolution, high reproducibility, and high retention that can be used in a vacuum.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control. It can operate with a 50mm stroke at a resolution of 5nm.

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Vacuum-compatible 5nm feedback stage, 40mm operation

Vacuum-compatible 5nm feedback stage, 40mm operation

High-performance positioning stage with 5nm resolution and 40mm travel, usable in a vacuum.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It has a built-in linear scale developed in-house, providing high-precision repeat positioning performance through full closed-loop control. It can operate with a 40mm stroke at a resolution of 5nm.

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Vacuum-compatible 10nm feedback stage, 40mm operation

Vacuum-compatible 10nm feedback stage, 40mm operation

High-performance positioning stage operating in a 40mm range with 10nm resolution for vacuum applications.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It features full closed-loop control based on the positional information from an integrated optical linear encoder, providing high-precision repeatability in positioning performance. It can operate with a 40mm stroke at a resolution of 10nm.

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Vacuum-compatible 10nm feedback stage, 100mm operation

Vacuum-compatible 10nm feedback stage, 100mm operation

Long stage with built-in linear encoder capable of 10nm resolution, usable in a vacuum.

This is a vacuum-compatible feedback stage equipped with outgassing countermeasures. It can be directly introduced into a vacuum chamber. It has a built-in optical linear encoder, and based on the position information detected by the encoder, it performs full closed-loop control, providing high-precision repeat positioning performance. With a movement range of 100mm, it allows for sample movement and precise positioning with a single unit, making it effective when a wide range of data (such as spectra) is required.

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Vacuum-compatible 10nm feedback stage, lifting type

Vacuum-compatible 10nm feedback stage, lifting type

Vacuum-compatible positioning stage for the Z-axis with a built-in linear encoder and 10nm resolution.

This is a high-resolution Z-axis positioning stage equipped with an optical linear encoder. It offers a resolution of 10nm with stroke options of 5mm or 10mm. It has been designed to mitigate outgassing, making it usable in a vacuum. The structure minimizes changes in the tilt of the table surface, and with our proprietary linear encoder and unique feedback control circuit, it provides high resolution, excellent positioning repeatability, and position retention after positioning.

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Vacuum-compatible 10nm feedback stage, micro-rotation type

Vacuum-compatible 10nm feedback stage, micro-rotation type

Micro-rotation stage with an encoder that operates with a minimum resolution of 0.00001° and ±4° in vacuum conditions.

This is a high-resolution micro-rotation stage equipped with an optical linear encoder. It has a resolution of 0.00001° and a stroke of ±4°. It has been treated for outgassing and can be used in a vacuum. It is suitable for adjusting the rotation direction.

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