System [Flow Control Device] FCS Pressure Series
This is a flow control device that adopts a pressure control method for ultra-high purity applications.
A flow control system that enables high-precision flow control, which cannot be achieved with conventional mass flow controllers, by controlling pressure. 【Features】 ○ Simple and dead space-free structure ○ Excellent pressure fluctuation characteristics Since the output value does not fluctuate even when the upstream pressure varies, it can be installed on the upstream side. Additionally, it allows for the elimination of regulators from the gas system, achieving both cost reduction and miniaturization of the gas system. ○ Adoption of flow factor Compatible with various types of gases ○ Excellent accuracy ○ Equipped with flow self-diagnosis function ○ Quick response ○ Mount position free ○ Supports device network communication ● For other functions and details, please download the catalog.
- Company:Fujikin Incorporated
- Price:Other