We have compiled a list of manufacturers, distributors, product information, reference prices, and rankings for Mass Flow Controller.
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Mass Flow Controller Product List and Ranking from 20 Manufacturers, Suppliers and Companies

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Mass Flow Controller Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. Fujikin Incorporated Tokyo//Machine elements and parts
  3. ＩＢＳ Osaka//Other manufacturing
  4. 4 リンテック 東京営業所 Tokyo//Machine elements and parts
  5. 5 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery
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Mass Flow Controller Product ranking

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. Mass Flow Controller/ Meter "SLAMf Series" ITWジャパン
  2. Fujikin Inc. "Mass Flow Controller" Fujikin Incorporated
  3. Mass Flow Controller/ Meter "5850E Series" ITWジャパン
  4. 4 System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  5. 5 Mass Flow Controller "Aera FC-R7700 Series" ＩＢＳ

Mass Flow Controller Product List

61～75 item / All 107 items

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System [Flow Control Device] FCS Pressure Series

System [Flow Control Device] FCS Pressure Series

This is a flow control device that adopts a pressure control method for ultra-high purity applications.

A flow control system that enables high-precision flow control, which cannot be achieved with conventional mass flow controllers, by controlling pressure. 【Features】 ○ Simple and dead space-free structure ○ Excellent pressure fluctuation characteristics Since the output value does not fluctuate even when the upstream pressure varies, it can be installed on the upstream side. Additionally, it allows for the elimination of regulators from the gas system, achieving both cost reduction and miniaturization of the gas system. ○ Adoption of flow factor Compatible with various types of gases ○ Excellent accuracy ○ Equipped with flow self-diagnosis function ○ Quick response ○ Mount position free ○ Supports device network communication ● For other functions and details, please download the catalog.

  • Flow Control

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Burkert Laboratory Catalog [Compressed Version]

Burkert Laboratory Catalog [Compressed Version]

We can further miniaturize and optimize laboratory equipment/research equipment.

This document describes how each of Bürkert's products can be utilized in laboratory equipment and other applications. We hope it will be of some assistance in improving your design and manufacturing processes. Due to the file size limitations of Ipros (with a maximum file size limit of 2MB), this document is in a compressed format (distributed as a single sheet printed with two pages). If you would like an uncompressed version, please contact Bürkert.

  • others

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A mass flow controller that reliably controls the flow of various gases and air!

A mass flow controller that reliably controls the flow of various gases and air!

Burkert's mass flow controllers can easily control small to large flow rates with a single unit! They also support a wide range of differential pressures from low to high (10 kPa to 1.0 MPa)!

Flow control of gases is best achieved with a mass flow controller (MFC)! The German manufacturing industry, which is gaining attention in Industry 4.0, presents a proposal for an "easy-to-use" mass flow controller (MFC) from Bürkert, a long-established fluid control equipment manufacturer in Germany, designed for the IoT era! ● Calibrated according to your usage conditions and shipped, so it can be used immediately after delivery! ● No dedicated power supply is required (starts with DC24V), making it easy to install. ● Capable of controlling flow rates from small to large (for example, up to 2500Nl/min (N2) with a single unit). ● Smooth control even at a low differential pressure of 10kPa thanks to the inline sensor. ● Smooth control even at a high differential pressure of 1.0 MPa (10bar). ● Complete shut-off achieved with resin seals and shut-off functionality. ● Fast response to set points, stabilizing within 0.3 to 0.5 seconds. 【Unique to Bürkert & IoT Generation】 ● Flexible support for communication methods such as OpenCAN, fieldbus, RS485, in addition to analog input and output signals. ● Models with protection rating IP65 are also available. ● Proposals focused on maintainability and space-saving designs are also possible!

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  • Flow Control

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Coriolis Mass Flow Controller Type 8756 High Precision Measurement Principle

Coriolis Mass Flow Controller Type 8756 High Precision Measurement Principle

The liquid MFC (mass flow controller) based on Burkert's Coriolis measurement principle can measure and control liquid flow rates from 10 to 280 g/min.

Burkert's Coriolis MFC (Mass Flow Controller for liquids) measures and controls liquid flow rates from 10 to 280 g/min. Compared to liquid mass flow controllers available on the market, it allows for the control of larger flow rates.

  • valve

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General-purpose mass flow controller '1179C'

General-purpose mass flow controller '1179C'

Can be installed without modifying existing gas lines with a standard 3-inch footprint!

The "1179C" is a versatile mass flow controller compatible with various applications. It has a full-scale range from 10 sccm to 20 sim and enables high-speed, highly reproducible flow control down to a low flow rate of 0.2 sccm. Additionally, by connecting a compatible pressure transducer, it can also be used as a pressure control device. It can be directly replaced with most common MFCs. The electrical connector is a D-sub connector with the same pin configuration, signals, and functions as industry standards, eliminating the need for changes to cables or connectors. It is compatible with MKS and other manufacturers' MFC power supplies and displays. 【Features】 ■ Supports demanding processes ■ Excellent zero stability due to patented sensor design ■ Accurate and highly reproducible flow measurement and control across a full-scale range of 10 sccm to 20 sim ■ Analog accuracy at full scale in percentage ■ Reduced downtime with fast warm-up ■ Compatible with other MKS MFCs and power readouts *For more details, please refer to the PDF document or feel free to contact us.

  • controller

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Mass Flow Controller "Type GM51A"

Mass Flow Controller "Type GM51A"

Built-in user interface allows for easy changes to range and gas type, reducing inventory!

The "Type GM51A" is a mass flow controller with a metal seal of 1.125" (28.6mm) width, suitable for a wide range of applications, with a full-scale flow rate of 5sccm to 50slm converted to N2. It combines a proven patented thermal sensor design with digital flow control electronics. With digital control electronics using the MKS control algorithm, it provides a standard response time of 500 msec and a fast, highly reproducible response to flow set points. It can be used in a multi-range for various gas types with a full-scale flow rate of 5sccm to 50slm converted to N2. Parameters for over 100 types of gases and gas mixtures are already registered in memory. The electropolished metal seal makes it suitable for high-purity process applications. 【Features】 ■ Excellent zero stability due to patented thermal sensor design ■ High precision and accurate process control at a set point of 1% (calibration gas) ■ Built-in user interface ■ Easy to change range and gas type, reducing inventory ■ In-situ equipment monitoring and data collection possible *For more details, please refer to the PDF document or feel free to contact us.

  • controller
  • Other process controls

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ALICAT Mass Flow Controller MC Series (Delivery time: 4 weeks)

ALICAT Mass Flow Controller MC Series (Delivery time: 4 weeks)

Supports mixed gases! Standard features include analog output, RS-232C communication, and a backlit LCD display. Current delivery time is 4 weeks.

The "MC/MCP/MCR series" is a mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup that supports 128 types of gases, including corrosive gases and refrigerant gases, such as the "MCS/MCRS series," "MCW/MCRW series," and "MCV/MCVS series." 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Supports mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments

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ALICAT Mass Flow Controller MCE Series SEMI Standard

ALICAT Mass Flow Controller MCE Series SEMI Standard

Mass flow controller with built-in valve from ALICAT, compliant with SEMI standards.

The "MCE/MCES series" is a mass flow controller manufactured by ALICAT, featuring a built-in valve that complies with SEMI standards. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments

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ALICAT High-Precision Mass Flow Controller for Bioreactors

ALICAT High-Precision Mass Flow Controller for Bioreactors

AriCat BIO Series! Reliable, adaptable, and compatible flow control.

The 【BIO Series】 is a mass flow controller manufactured by ALICAT that features a laminar flow method (differential pressure type) with a fast response time of 10 ms. - Long-term stability: Extremely low zero drift - Assurance against process water contamination - High contrast, clear display - ASME (American Society of Mechanical Engineers) recommended: 316L stainless steel and USP Class VI, FDA (Food and Drug Administration) grade elastomers - Gas selection switching possible without recalibration and without loss of accuracy - Industrial Ethernet - Wide range flow: 1 SCCM to 5000 SLPM - Response speed of 10 ms enables high-speed data recording - Flexible process connection (SAE standard)

  • Other measurement, recording and measuring instruments

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High-pressure Smart Series Mass Flow Controller SLA5850

High-pressure Smart Series Mass Flow Controller SLA5850

Equipped with both analog and digital interfaces.

A mass flow controller capable of handling ultra-high pressure specifications up to 30MPa, thanks to its distinctive valve structure.

  • Flow Control

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Thermal liquid mass flow controller

Thermal liquid mass flow controller

Adopting a through-type sensor.

Mass flow controller for liquids based on a new thermodynamic principle sensor design (international patent).

  • Flow Control

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Coriolis mass flow controller for liquids and gases

Coriolis mass flow controller for liquids and gases

Adoption of a groundbreaking design (patented) Coriolis mass flow sensor.

A mass flow controller for liquids and gases that offers unparalleled high precision and zero stability in the field of small flow liquids, which are considered difficult to measure.

  • Flow Control

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Mass Flow Controller "Aera FC-R7800 Series"

Mass Flow Controller "Aera FC-R7800 Series"

Flow stabilizes in less than 1 second after setting input! High precision and high reliability metal seal model!

The "Aera FC-R7800 Series" is a system that not only performs high-precision flow control but also features excellent airtightness due to its metal seals. It is suitable for major gas control applications. Thanks to advancements in technology, such as the incorporation of highly sensitive and fast-response small sensors, it demonstrates excellent controllability. 【Features】 ■ Corrosion-resistant design ■ Metal seal adoption ■ VCR and Swagelok compatible connections ■ Full-scale flow range from 10 sccm to 200 slm ■ Normally closed or normally open solenoid control valves *For more details, please refer to the PDF materials or feel free to contact us.

  • valve

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Digital Mass Flow Controller Aera Transformer

Digital Mass Flow Controller Aera Transformer

Inclusive communication and control! A versatile mass flow controller that contributes to cost reduction.

The "Aera Transformer" is a digital mass flow controller suitable for various applications such as CAD, PVD, diffusion, and etching. The thin film growth and etching characteristics produced by this product boast excellent homogeneity and high reproducibility. With outstanding responsiveness, accuracy, and reproducibility, it enhances the productivity and yield of the equipment. 【Features】 ■ Multi-gas, multi-range ■ High-speed responsiveness ■ 100% metal seal, high-purity design ■ Compatible with DeviceNet, RS-485, and analog control *For more details, please refer to the PDF document or feel free to contact us.

  • valve

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Mass Flow Mass Flow Controller REC-2324 TYPE

Mass Flow Mass Flow Controller REC-2324 TYPE

This is a 24V powered single supply mass flow controller that matches general industrial equipment.

In terms of structure, it is of a magnetic tracking type, which follows the movement of the float inside the metal tapered tube and accurately indicates it externally.

  • Flow Meter
  • Flow Control

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