We have compiled a list of manufacturers, distributors, product information, reference prices, and rankings for Mass Flow Controller.
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Mass Flow Controller Product List and Ranking from 20 Manufacturers, Suppliers and Companies

Last Updated: Aggregation Period:Sep 17, 2025~Oct 14, 2025
This ranking is based on the number of page views on our site.

Mass Flow Controller Manufacturer, Suppliers and Company Rankings

Last Updated: Aggregation Period:Sep 17, 2025~Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. Fujikin Incorporated Tokyo//Machine elements and parts
  3. IBS Osaka//Other manufacturing
  4. 4 リンテック 東京営業所 Tokyo//Machine elements and parts
  5. 5 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery

Mass Flow Controller Product ranking

Last Updated: Aggregation Period:Sep 17, 2025~Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. Mass Flow Controller/ Meter "SLAMf Series" ITWジャパン
  2. Fujikin Inc. "Mass Flow Controller" Fujikin Incorporated
  3. Mass Flow Controller/ Meter "5850E Series" ITWジャパン
  4. 4 System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  5. 5 Mass Flow Controller "Aera FC-R7700 Series" IBS

Mass Flow Controller Product List

46~60 item / All 107 items

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Mass Flow Controller/ Meter "SLAMf Series"

Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

Dust, humidity, extreme temperatures, moisture, and other harsh conditions—no matter the environment, the 'SLAMf Series' elastomer seal thermal mass flow controllers/meters achieve high precision and long-term stability unique to the proven 'SLA5800 family' of meters and controllers. The specially designed NEMA4X/IP66 rated enclosure protects advanced digital electronic components, enabling stable and accurate measurement and control of gas/fluid mass flow essential for processes. 【Features】 ■ High durability enclosure rated NEMA4X / IP66 ■ Wide range of rated flow - from 0.003 to 2500 slpm ■ Compatible with a wide range of temperature and pressure conditions ■ Achieves excellent accuracy ■ Configurable multi-gas/multi-range functionality *For more details, please refer to the related link page or feel free to contact us.

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  • Flow Meter
  • Flow Control

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Metal Seal Mass Flow Controller/ Meter "GF125 Series"

MFC that makes everything possible

The "GF125 Series," equipped with ultra-fast response times and high levels of cleanliness, is a second-generation multivariable measurement, PTI (Pressure Variation Resistance) metal-sealed mass flow controller. It minimizes fluctuations in process gas flow due to variations in pressure and temperature. With standard MultiFlo technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. As a result, it reduces the need for pressure regulators, pressure transducers, and related hardware installations at each point, thereby shrinking the size and cost of gas panels while maximizing yield and productivity with industry-leading PTI performance. 【Features】 ■ Long-term zero stability: less than 0.5% full scale/year ■ Settling time: less than 300 ms - 700 ms ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: 4µ inch Ra surface finish ■ SEMI F20 compliant materials for gas and liquid contact parts ■ Corrosion-resistant Hastelloy® T-Rise sensor, etc. *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Flow Meter

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Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Safety Controller
  • Flow Meter
  • Flow Control

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Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>

Thin films, coatings, and surface treatments cover a wide range of industries and applications!

Surfaces of industrial and consumer products may be coated to optimize their finish. For example, it is possible to improve the wear resistance of cutting tools, scratch resistance of glass, thermal properties of plate glass, and aesthetics of household appliances. There are various coating methods such as chemical vapor deposition, physical vapor deposition, plasma treatment processes, and thermal spraying, but they are often performed as the final stage of the manufacturing process. Brooks Instrument's mass flow, vacuum, pressure measurement, and control devices cover PVD and CVD process applications. Additionally, our products are suitable for surface treatment applications such as heat treatment and plasma processing. 【Features】 ■ High reproducibility and precision gas supply ■ Excellent quality, accurate thickness, and uniform film thickness ■ Long-term stable process control ■ High-functionality flow diagnostics and trend analysis in the field to maximize process yield *For more details, please refer to the PDF document or feel free to contact us.

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  • Flow Meter
  • Flow Control

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High-performance mass flow controller MC-3000L series

This is a high-performance digital mass flow controller that employs our proprietary self-temperature compensation method (patented in the U.S. and Japan).

This is a digital mass flow controller that achieves high precision of 1.0% S.P. with its unique patented technology and is compatible with various surface mount standards (1.125 inches). 【Features】 ○ High-performance 1.125-inch size digital mass flow controller (piezo valve, high precision (S.P. guaranteed), digital control) ○ Maintains compatibility with analog mass flow controllers ○ Universal interface RS485 is available ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Compatible with various surface mount standards of SEMI STD. *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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Variable Range Compatible Mass Flow Controller MC-700

It is a mass flow controller that supports multi-range while being low-cost.

This is a mass flow controller that can be changed for various gases and ranges using the rotary switch located on the upper part of the MFC. 【Features】 ○ Short delivery time model ○ Equipped with high-speed, high-performance piezo actuator ○ Universal interface RS485 is available ○ Standard ultra-clean specification with metal seals and precision polished inner surfaces ○ Various gases and ranges can be changed using the rotary switch *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control

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High-speed response mass flow controller "MC-7000 Series"

Adopts Au seal and piezo actuators! Compatible with various digital interfaces.

The "MC-7000 Series" is a high-speed response mass flow controller that achieves a response time of less than 200 msec with a thermal sensor. By adopting Lintec's unique self-temperature compensation method, it can handle corrosive gases and liquefied gases, ensuring a flow accuracy of ±1.0% S.P. It also supports various digital interfaces such as DeviceNet and EtherCAT. 【Features】 ■ Uses Au seals and piezo actuators ■ Achieves a response time of less than 200 msec with a thermal sensor ■ Adopts Lintec's unique self-temperature compensation method ■ Compatible with corrosive gases and liquefied gases ■ Guarantees flow accuracy of ±1.0% S.P. *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Control
  • Weighing Control

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MODEL EX-550 SERIES

Introducing metal seal digital mass flow controllers/meters for N2, Air, H2, and more!

The "MODEL EX-550 SERIES" is a metal-sealed digital mass flow controller/meter that allows for gas type switching via a rotary switch. It enables high-precision measurement with S.P. accuracy, and the entire flow control range responds within 1 second. It features RS485 communication capabilities and allows for the selection of analog input/output of 0-5VDC/4-20mA and power supply of ±15VDC/24VDC. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: 10 SCCM to 5 SLM ■ Accuracy: ±1% S.P. (25-100% F.S.), ±0.25% F.S. (up to 25% F.S.) ■ High-precision measurement is possible with S.P. accuracy ■ Gas type switching is possible via a rotary switch *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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MODEL 8700 SERIES

Integrated display type with various functions available! Introducing mass flow controllers/meters.

The "MODEL 8700 SERIES" is a mass flow controller/meter with a display that accommodates a wide range of flow rates. Various functions (instantaneous/integrated flow display, alarm settings) are available. The target fluids include gases such as N2, Air, H2, He, Ar, O2, and CO2. Additionally, it features RS485 communication capabilities and analog input/output of 0-5VDC (which can be changed to 4-20mA). 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM when converted to N2) ■ Analog input/output can be changed via the display (0-5VDC at the time of shipment) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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MODEL 3660 SERIES

Standard mass flow controller compatible with a wide flow range for N2, Air, H2, He, and others!

We would like to introduce our standard mass flow controller, the 'MODEL 3660 SERIES'. It supports a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 10 SCCM to 100 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM, converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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MODEL 3200 SERIES

Reduction of dead volume! Introducing a high-grade mass flow controller with an accuracy of ±1% F.S.

The "MODEL 3200 SERIES" is a high-grade mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume through a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter

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Gas Mixing Device "BRENDA SERIES"

Automatic calculation of gas flow rates for each line! Remote control via mobile devices is possible.

The "BRENDA SERIES" has made it possible to produce mixed gases with an accurate gas mixing ratio using a high-performance digital mass flow controller. Additionally, the adoption of an 8-inch touch panel has simplified the setting of mixed gas concentration and flow rate. This product is also feature-rich, equipped with a standard VNC server function, enabling remote operation via a network and remote control via mobile devices through a wireless access point. 【Features】 ■ High-performance digital mass flow controller ■ Ratio setting mode ■ Step mode ■ VNC server function ■ Data logging function *For more details, please refer to the PDF document or feel free to contact us.

  • Gas Generator

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Mass Flow Controller MODEL 8700/3660 SERIES

It is less affected by temperature and pressure, allowing for high-precision flow measurement and control! Gases such as N2, Air, H2, He, and Ar are the targets.

We would like to introduce our mass flow controllers, the 'MODEL 8700/3660 SERIES'. The mass flow controller/indicator "MODEL 8700 SERIES" features analog input/output of 0-5VDC (which can be changed to 4-20mA) and offers various functions such as instantaneous/integrated flow display and alarm settings. The standard mass flow controller "MODEL 3660 SERIES" accommodates a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, equivalent to N2. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM equivalent to N2) ■ Analog input/output can be changed via the display (MODEL 8700 SERIES) *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments

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System [Flow Control Device] FCS Thermal Series

This is a flow control device that adopts a thermal flow sensor control method.

Achieved further total cost reduction and shortened lead time with a digital interface-equipped mass flow controller. 【Features】 ○ High precision Flow accuracy of ±1% ○ High-performance sensor Adoption of low-temperature flow sensors, achieving optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve with reduced gas contact area and prevention of particle generation Adoption of high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.

  • Flow Control

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