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Mass Flow Controller Product List and Ranking from 20 Manufacturers, Suppliers and Companies

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Mass Flow Controller Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. Fujikin Incorporated Tokyo//Machine elements and parts
  3. ＩＢＳ Osaka//Other manufacturing
  4. 4 リンテック 東京営業所 Tokyo//Machine elements and parts
  5. 5 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery
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Mass Flow Controller Product ranking

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. Mass Flow Controller/ Meter "SLAMf Series" ITWジャパン
  2. Fujikin Inc. "Mass Flow Controller" Fujikin Incorporated
  3. Mass Flow Controller/ Meter "5850E Series" ITWジャパン
  4. 4 System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  5. 5 Mass Flow Controller "Aera FC-R7700 Series" ＩＢＳ

Mass Flow Controller Product List

31～45 item / All 107 items

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Mass Flow Controller Trouble Case Collection

Mass Flow Controller Trouble Case Collection

Examples of troubles such as valve clogging in mass flow controllers are published!

The "Mass Flow Controller Trouble Case Collection" is a compilation of various troubles related to mass flow controllers, including incidents, causes, and responses. [Included Cases] ■ Valve clogging in mass flow controllers ■ Oil contamination in mass flow ■ Valve malfunction in mass flow ■ Mass flow controller not producing flow ■ Difficulty in mass flow, among others For more details, please refer to the catalog or feel free to contact us.

  • Flow Meter
  • Flow Control
  • Calibration and repair

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Mass flow controller, Alicat Corporation

Mass flow controller, Alicat Corporation

Standard features include a 100ms control response, high flow accuracy of ±(0.8% RD + 0.2% FS), analog output, and RS-232C communication.

★ Achieves fast response with the laminar flow method (differential pressure type). ★ Quickly follows flow rate changes. You can obtain the desired flow rate in a short time due to high-speed control response. ★ Flow rate settings can be made not only through front switch operation but also via analog input and RS-232C communication. ★ Standard equipped with mass flow rate 0-5VDC output. Options for 0-10VDC, 1-5VDC, and 4-20mADC are also available. Additionally, a second analog output can be added. ★ A wide range of models is available, from a small 0.5SCCM type to a large 5000SLPM type. ★ Capable of controlling 98 types of gases, including mixed gases, with a single unit. Gas selection can be easily performed using the front switch operation. For more details, please contact us or download the catalog.

  • mfc1.png
  • Flow Control
  • Other process controls

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Mass Flow Controller 'SFC6000D-50slm'

Mass Flow Controller 'SFC6000D-50slm'

Samples available in a short lead time of 8 weeks! The supply chain is robust.

The "SFC6000D-50slm" is a mass flow controller that demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. It is a highly attractive product with an excellent price-performance ratio and a short delivery time of 8 weeks for obtaining samples. Additionally, its very small and lightweight design allows for optimization of device size and weight, which is a decisive advantage, especially for portable devices. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Excellent performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

  • Flow Control

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Mass Flow Controller "SFC5300"

Mass Flow Controller "SFC5300"

Introducing MFC for OEM projects with strict cost requirements for mass production!

The "SFC5300" is a mass flow controller capable of measuring and controlling mass flow with excellent accuracy, long-term stability, and reproducibility. Despite its compact size, it can measure over a wide dynamic range, and the body is made of metal. Additionally, the product features a down-mount connection for fluid connections and offers two digital interfaces for connectivity. 【Specifications (partial)】 ■ Full-scale flow: 1, 2, 5, and 10 slm ■ Full-scale flow: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

  • controller

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Mass Flow Controller "SFC5330"

Mass Flow Controller "SFC5330"

Excellent accuracy, long-term stability, and reproducibility! Achieving outstanding performance.

The SFC5330 is a mass flow controller that achieves a dynamic measurement range while being compact in size. It is a smaller version of the SFC5300, making it suitable for cost-sensitive mass production OEM projects. Additionally, a valve-less type is also available, which has the same performance characteristics and similar applications, allowing for combination use. 【Specifications (partial)】 ■ Full-scale flow rate: 1, 2, and 5 slm ■ Full-scale flow rate: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

  • controller

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Mass Flow Controller "SFC5400"

Mass Flow Controller "SFC5400"

The main body is made of metal! A version without a valve is also available.

The "SFC5400" is a versatile mass flow controller that can connect to various interfaces and fluid connections. It can measure a maximum flow rate from 50 sccm to 200 slm, and the sensor signal is calibrated on the chip and directly converted into a temperature-compensated digital signal. Additionally, it can store multiple gas calibration data in one device, allowing you to check whether the operating gas calibration value matches the actual gas being measured. 【Specifications (partial)】 ■ Full-scale flow rates: 1, 2, 5, 10, 20, 50, and 100 slm ■ Full-scale flow rates: 50, 100, 200, and 500 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector ports: Swagelok, VCO, VCR, Downmount *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5500-2slm"

Mass Flow Controller "SFC5500-2slm"

Utilizing CMOSens MEMS technology! Available as standard products suitable for a wide range of applications.

The "SFC5500-2slm" is a mass flow controller that does not drift and does not require recalibration in the market. It combines multiple gas calibrations and interchangeable fittings, making it available as a standard product suitable for a wide range of applications. Additionally, it is suitable for a variety of environments in medical, analytical, and industrial settings, and you can choose from standard pre-set variations. 【Specifications (partial)】 ■ Full-scale flow: 2 slm ■ Full-scale flow: 2000 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 8 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-0.5slm'

Mass Flow Controller 'SFC5500-0.5slm'

A culmination of our 20 years of achievements in the precise control of gas flow!

The "SFC5500-0.5slm" is a mass flow controller that combines multiple gas calibrations and interchangeable fittings. This product is based on the microthermal measurement principle and utilizes our proven CMOSens MEMS technology. Additionally, unlike other products on the market, it does not drift and does not require recalibration in the market. 【Specifications (partial)】 ■ Full scale flow rate: 0.5slm ■ Full scale flow rate: 500sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5500-200slm"

Mass Flow Controller "SFC5500-200slm"

Utilizing CMOSens MEMS technology! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-200slm" is a mass flow controller that can accommodate multiple flow ranges in a single product. It can be obtained as a standard product suitable for a wide range of applications by combining multiple gas calibrations and interchangeable fittings. Additionally, it does not drift and does not require recalibration in the market. Please feel free to contact us when you need assistance. 【Specifications (partial)】 ■ Full-scale flow: 200slm ■ Full-scale flow: 200000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, and N2 flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Aera PI-980 Pressure-Insensitive MFC

Aera PI-980 Pressure-Insensitive MFC

Next-generation PI technology that meets tomorrow's process needs.

This groundbreaking technology platform improves responsiveness, gas flow stability, and measurement accuracy compared to conventional technologies, demonstrating excellent performance in real-time process control. Its superior flow stability enhances process reproducibility between chambers and improves production yield. The PI-980 series reduces the need for expensive gas panel components traditionally used in conventional thermal structures by integrating pressure sensors, temperature sensors, and our proprietary NeuralStep control technology. Additionally, the multi-gas, multi-range functionality dramatically reduces the need for spare inventory, further contributing to cost efficiency. This next-generation MFC technology, combined with the integrated diagnostic capabilities and the platform of our proven D980 series products in the field, enhances equipment uptime and enables rapid and easy troubleshooting.

  • CVD Equipment
  • Sputtering Equipment
  • Etching Equipment

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Mass Flow Controller "1000 Series"

Mass Flow Controller "1000 Series"

Suppresses overshoot at startup! High-performance gas flow controller at a low price.

The "1000 Series" is a high-performance gas flow controller that specializes in the basic functions of mass flow controllers, designed as an analog low-cost model. It can be used in a wide range of fields such as various analyses, film formation, physical and chemical experiments, and manufacturing applications. Additionally, we offer a dedicated power supply "PA01" with a simple design that only includes flow rate setting and display, making it easy to operate. 【Features】 ■ Low cost ■ Compact size ■ Suppresses overshoot at startup ■ Valve type: Normally open ■ Flow control range: 5–100% F.S. *For more details, please refer to the PDF materials or feel free to contact us.

  • Other process controls

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Coriolis mass flow controller/meter "QuantimQMC"

Coriolis mass flow controller/meter "QuantimQMC"

The new 3rd generation Quantim QMC Coriolis flow meter is suitable for applications involving the measurement and control of small flow rates of gases and liquids.

The Quantim® QMC Coriolis mass flow controller and meter provide extremely accurate, stable, and reproducible measurement and control for very low flow rates of gases and liquids. This third-generation new Quantim QMC Coriolis mass flow controller and meter contribute to shortening the scale-up period from lab to pilot plant to production by enhancing process quality, production yield, and throughput. The new Quantim QMC Coriolis mass flow series is compatible in terms of mounting dimensions and functionality with the old models of Quantim from Brooks Instrument. 【Features】 ■ True mass flow measurement ■ Accurate density measurement ■ Additional I/O options: 0-10 Vdc, 0-20 mA, RS485 S-Protocol ■ A wide range of seal materials, certificates, and certification options ■ Easily accessible service port *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
  • Flow Control

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Mass Flow Controller/ Meter "5850E Series"

Mass Flow Controller/ Meter "5850E Series"

Excellent long-term stability, maintaining production accuracy! We perform highly reliable, precise, and repeatable measurements and controls.

The "5850E Series" is an elastomer-sealed thermal mass flow controller/meter. This series has a proven track record of being actively used in thousands of applications worldwide for several decades, equipped with a unique stable flow sensor that provides high reliability, accuracy, and repeatability necessary for the demanding industrial production processes of today. 【Features】 ■ Removable flow sensor ■ No influence from mounting position ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
  • Flow Control

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