Mass Flow Controller Product List and Ranking from 17 Manufacturers, Suppliers and Companies

Coriolis Mass Flow Controller Type 8756 High Precision Measurement Principle

The liquid MFC (mass flow controller) based on Burkert's Coriolis measurement principle can measure and control liquid flow rates from 10 to 280 g/min.

Burkert's Coriolis MFC (Mass Flow Controller for liquids) measures and controls liquid flow rates from 10 to 280 g/min. Compared to liquid mass flow controllers available on the market, it allows for the control of larger flow rates.

Company：ビュルケルトジャパン
Price：1 million yen-5 million yen

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General-purpose mass flow controller '1179C'

Can be installed without modifying existing gas lines with a standard 3-inch footprint!

The "1179C" is a versatile mass flow controller compatible with various applications. It has a full-scale range from 10 sccm to 20 sim and enables high-speed, highly reproducible flow control down to a low flow rate of 0.2 sccm. Additionally, by connecting a compatible pressure transducer, it can also be used as a pressure control device. It can be directly replaced with most common MFCs. The electrical connector is a D-sub connector with the same pin configuration, signals, and functions as industry standards, eliminating the need for changes to cables or connectors. It is compatible with MKS and other manufacturers' MFC power supplies and displays. 【Features】 ■ Supports demanding processes ■ Excellent zero stability due to patented sensor design ■ Accurate and highly reproducible flow measurement and control across a full-scale range of 10 sccm to 20 sim ■ Analog accuracy at full scale in percentage ■ Reduced downtime with fast warm-up ■ Compatible with other MKS MFCs and power readouts *For more details, please refer to the PDF document or feel free to contact us.

Company：日本エム・ケー・エス
Price：Other

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Mass Flow Controller "Type GM51A"

Built-in user interface allows for easy changes to range and gas type, reducing inventory!

The "Type GM51A" is a mass flow controller with a metal seal of 1.125" (28.6mm) width, suitable for a wide range of applications, with a full-scale flow rate of 5sccm to 50slm converted to N2. It combines a proven patented thermal sensor design with digital flow control electronics. With digital control electronics using the MKS control algorithm, it provides a standard response time of 500 msec and a fast, highly reproducible response to flow set points. It can be used in a multi-range for various gas types with a full-scale flow rate of 5sccm to 50slm converted to N2. Parameters for over 100 types of gases and gas mixtures are already registered in memory. The electropolished metal seal makes it suitable for high-purity process applications. 【Features】 ■ Excellent zero stability due to patented thermal sensor design ■ High precision and accurate process control at a set point of 1% (calibration gas) ■ Built-in user interface ■ Easy to change range and gas type, reducing inventory ■ In-situ equipment monitoring and data collection possible *For more details, please refer to the PDF document or feel free to contact us.

Company：日本エム・ケー・エス
Price：Other

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ALICAT Mass Flow Controller MC Series (Delivery time: 4-8 weeks)

Supports mixed gases! Standard features include analog output, RS-232C communication, and a backlit LCD display. Current delivery time is 8 weeks.

The "MC/MCP/MCR series" is a mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup that supports 128 types of gases, including corrosive gases and refrigerant gases, such as the "MCS/MCRS series," "MCW/MCRW series," and "MCV/MCVS series." 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 12000 SLPM ■ Standard analog output and RS 232C communication ■ Supports mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：Other

Flow Meter
Flow Control
Coriolis flow meter
Mass Flow Controller

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ALICAT Mass Flow Controller MCS (Corrosive/Refrigerant Compatible)

Supports mixed gases! Equipped with standard analog output, RS-232C communication, and a backlit LCD display.

The "MCS/MCRS series" is a mass flow controller manufactured by ALICAT that can measure 128 types of gas flow, including corrosive gases and refrigerant gases, with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. Additionally, it includes the "MW series," which can measure with extremely small differential pressures. 【Features】 ■ 100 ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 3000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：Other

Flow Meter
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Flow Control
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ALICAT Mass Flow Controller MCE Series SEMI Standard

Mass flow controller with built-in valve from ALICAT, compliant with SEMI standards.

The "MCE/MCES series" is a mass flow controller manufactured by ALICAT, featuring a built-in valve that complies with SEMI standards. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：Other

Flow Meter
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Flow Control
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ALICAT Mass Flow Controller MCQ Series (High Pressure Type)

The maximum operating pressure is 320 PSIA (2.2 MPaA). The pressure resistance is 400 PSIA (2.7 MPaA). It is also compatible with mixed gases!

The "MC/MCP/MCR series" is a high-pressure mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup such as the "MCHQS/MCRQS series," which supports 128 types of gases, including corrosive gases and refrigerant gases. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：Other

Flow Meter
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Flow Control
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ALICAT Mass Flow Controller MCD (Dual Valve)

Equipped with two valves, it allows for bidirectional control. Control can be performed using pressurization, negative pressure, or vacuum. Models that accommodate corrosive gases and low-pressure loss are also available in the lineup.

The "MCD/MCDS series" is a mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup that supports 128 types of gases, including corrosive gases and refrigerant gases, such as the "MCDS series" and "MCDW series." 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

Company：日本スターテクノ
Price：Other

Flow Control
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ALICAT High-Precision Mass Flow Controller for Bioreactors

AriCat BIO Series! Reliable, adaptable, and compatible flow control.

The 【BIO Series】 is a mass flow controller manufactured by ALICAT that features a laminar flow method (differential pressure type) with a fast response time of 10 ms. - Long-term stability: Extremely low zero drift - Assurance against process water contamination - High contrast, clear display - ASME (American Society of Mechanical Engineers) recommended: 316L stainless steel and USP Class VI, FDA (Food and Drug Administration) grade elastomers - Gas selection switching possible without recalibration and without loss of accuracy - Industrial Ethernet - Wide range flow: 1 SCCM to 5000 SLPM - Response speed of 10 ms enables high-speed data recording - Flexible process connection (SAE standard)

Company：日本スターテクノ
Price：Other

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High-pressure Smart Series Mass Flow Controller SLA5850

Equipped with both analog and digital interfaces.

A mass flow controller capable of handling ultra-high pressure specifications up to 30MPa, thanks to its distinctive valve structure.

Company：川口液化ケミカル川口事業所
Price：Other

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Thermal liquid mass flow controller

Adopting a through-type sensor.

Mass flow controller for liquids based on a new thermodynamic principle sensor design (international patent).

Company：川口液化ケミカル川口事業所
Price：Other

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Coriolis mass flow controller for liquids and gases

Adoption of a groundbreaking design (patented) Coriolis mass flow sensor.

A mass flow controller for liquids and gases that offers unparalleled high precision and zero stability in the field of small flow liquids, which are considered difficult to measure.

Company：川口液化ケミカル川口事業所
Price：Other

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Mass Flow Mass Flow Controller REC-2324 TYPE

This is a 24V powered single supply mass flow controller that matches general industrial equipment.

In terms of structure, it is of a magnetic tracking type, which follows the movement of the float inside the metal tapered tube and accurately indicates it externally.

Company：大阪フローメーター工業本社
Price：Other

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Current input terminal connection component coaxial Kapton cable with vacuum side plug

Can be used in ultra-high vacuum environments. Please choose from a wide range of options.

The current introduction terminal connection component, coaxial cable with vacuum-side plug made of Kapton(R), can be used in ultra-high vacuum environments. Please choose the optimal item from our extensive lineup. The materials include a shell made of SUS303/SUS304/SUS304 with gold plating, an insulator made of PEEK(R), and the cable made of Kapton(R). The maximum voltage (V max.DC) is 1,000 for the BNC type, 5,000 for the SHV/MHV type, and 700 for the SMA type. The maximum current (A max.) is 3, and the operating temperature range (℃) is -75 to 250. For more details, please contact us or refer to the catalog.

Company：コスモ・テック
Price：Other

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Thermal Mass Flow Controller EL-FLOW Base

A new mass flow controller that pursues cost reduction and flexibility in various applications.

The EL-FLOW Base series mass flow controllers are low-cost models that incorporate the latest technology from Bronkhorst while focusing on standard features to keep prices down. They are first-response mass flow controllers developed specifically for OEM applications. They provide accurate measurement and stable control for general gas applications. The EL-FLOW Base offers a very economical cost solution, especially for installation in OEM equipment. In addition to the previous F-201CB and F-201AB models, the F-202BB with a maximum flow rate of 200 ln/min Air has been added. For more details, please download and view the catalog.

Company：ブロンコスト・ジャパン
Price：Other

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mini CORI-FLOW mass flow controller (flow meter)

Mass flow controller with high-speed control capability due to fast sensor response.

The "mini CORI-FLOW(R) mass flow controller (flow meter)" features high stability control output and fast response. Due to the fast sensor response (50…200 msec), high-speed control has become possible. Therefore, applications such as split delivery can be expected. 【Features】 ○ Directly connected control valve ○ Fast response For more details, please contact us or download the catalog.

Company：ブロンコスト・ジャパン
Price：Other

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Application of mini CORI-FLOW (Pump System Case 2)

[Pump System Case 2] Supercritical Gas Measurement and Control

Fluids near the supercritical region; measuring substances like carbon dioxide (CO2) and ethylene (C2H4) is not easy. For example, carbon dioxide CO2 enters the critical region when the temperature exceeds 20°C and the pressure is around 30 bara. Under such conditions, the physical properties, such as density and specific heat, change rapidly as a result of temperature and pressure variations. Therefore, measuring these fluids using thermal methods becomes very difficult. The "Mini CORI-FLOW(R)" provides true mass flow measurement regardless of physical properties, thus solving these issues all at once. 【Application Examples】 ○ Measures the mass of the molecules themselves, whether the fluid is in gas, liquid, or at their boundary. ○ This measurement principle has been field-validated to provide high precision and stable measurements. For more details, please contact us or download the catalog.

Company：ブロンコスト・ジャパン
Price：Other

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Mass Flow Meter and Mass Flow Controller Comprehensive Catalog

Overwhelming share in Europe! Covers a wide flow range for both liquids and gases! Comprehensive catalog of mass flow measurement and control equipment available now!

This is the comprehensive catalog of mass flow meters and mass flow controllers handled by Bronkhorst Hi-Tech, which boasts an overwhelming share in the field of flow measurement and control in Europe. You are sure to find a wide range of devices that combine the necessary accuracy and flow range for your purposes. Since 1981, we have been developing high-precision products that cover a wide range from micro to large flow, primarily focusing on thermal and Coriolis types. Our products are adopted in R&D and industrial sectors around the world. Our Coriolis products specialized for small flow areas are also noteworthy. 【For those facing these issues】 ■ Want to improve reproducibility during temperature and pressure fluctuations ■ Instruments take up too much space ■ Want to reduce recalibration every time the liquid changes 【Contents included】 ○ EL-FLOW series ○ IN-FLOW series ○ EX-FLOW series ○ LOW-ΔP-FLOW series ○ EL-PRESS series ○ OEM solutions ○ LIQUI-FLOW series, etc. ◆ For other functions and details, please download the catalog.

Company：ブロンコスト・ジャパン
Price：Other

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Mass Flow Controller EL-FLOW Classic

Ideal for OEMs. A thermal digital mass flow controller dedicated to analog I/O, pursuing cost reduction and flexibility for various applications.

The EL-FLOW Classic series digital mass flow controllers are models that focus on the fundamental functions of flow measurement and control while incorporating Bronkhorst's latest technology at a competitive price. They are compatible with analog I/O (not supporting digital communication) and are available only for standard gases (Air, N2, H2, O2, He, Ar, CO, CO2, N2O, CH4), which helps to shorten delivery times. For more details, please refer to the catalog or contact us.

Company：ブロンコスト・ジャパン
Price：Other

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LOW-ΔP-FLOW Mass Flow Controller for Low Pressure Loss and Corrosive Gases

It is a mass flow meter and controller that is resistant to clogging and has low pressure loss. It is suitable for corrosive gases as well. It is equipped with a specially designed sensor and laminar flow element.

The LOW-ΔP-FLOW series is a mass flow meter/controller developed by Bronkhorst Hi-Tech for low-pressure loss applications. It features a low-pressure loss sensor and laminar flow element, making it ideal for operation at low differential pressures. Minimum range: 0.2...10 mln/min Maximum range: 20...1000 m3n/h Features: - Extremely low pressure loss - Structure that is resistant to clogging and easy to purge - Industrial-grade housing available (IP65) The low-pressure loss mass flow controller LOW-ΔP-FLOW has a compact design, with the flow meter and control valve integrated into a single body. The maximum flow capacity of these compact models is 1...50 ln/min (air-based), depending on operating conditions. For large flow control at low differential pressures, it is offered in combination with a pressure-compensated bellows valve and a low-pressure loss type flow meter (integrated into the controller). Additionally, the equipment can support various fieldbus protocols by adding a compact communication PCB: DeviceNetTM, Profibus-DP(R), EtherCAT, Modbus, or FLOW-BUS protocol.

Company：ブロンコスト・ジャパン
Price：Other

Flow Meter
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mini CORI-FLOW mass flow controller (flow meter)

Mass flow controller with high-speed control capability due to fast sensor response *Exhibited at the Nano Society Conference.

The "mini CORI-FLOW(R) mass flow controller (flow meter)" features high stability control output and fast response. Due to the fast sensor response (50…200 msec), high-speed control has become possible. Therefore, applications such as split delivery can be expected. 【Features】 ○ Directly connected control valve ○ Fast response ★ We will be exhibiting at the 16th Nano Society Conference! Date: May 10 (Thursday) to May 12 (Saturday), 2018 Venue: The University of Tokyo, Asano Campus, Takeda Advanced Research Building, Takeda Hall, 5th Floor We hope you can join us for this opportunity. For more details, please contact us or download the catalog.

Company：ブロンコスト・ジャパン
Price：Other

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Mass Flow Controller 'SFC6000D-5slm'

The supply chain is robust because the number of electronic components used is very small! For semiconductors, analytical instruments, and medical devices.

The SFC6000D-5slm is a highly attractive mass flow controller with an excellent price-performance ratio and a delivery time of 8 weeks. Its small and lightweight design allows for optimization of device size and weight, providing a decisive advantage, especially for portable devices. Furthermore, it demonstrates outstanding performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

Company：センシリオン
Price：Other

Flow Control
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Mass Flow Controller 'SFC6000D-20slm'

Excellent price-performance ratio! This is a very attractive product with a delivery time of 8 weeks.

The "SFC6000D-20slm" is a mass flow controller that is very small and lightweight, allowing for optimization of the device's size and weight. Due to advanced integration and a very low number of electronic components used, the supply chain is robust. Furthermore, it demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, enabling optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Robust supply chain due to the very low number of electronic components used *For more details, please download the PDF or feel free to contact us.

Company：センシリオン
Price：Other

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Mass Flow Controller 'SFC5500-50sccm'

Combined multiple gas calibrations and interchangeable fittings! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-50sccm" is a mass flow controller based on micro-thermal measurement principles. It utilizes proven CMOSens MEMS technology, ensuring no drift and eliminating the need for recalibration in the market. Additionally, its wide range of flow control capabilities allows a single product to accommodate multiple flow ranges. 【Specifications (partial)】 ■ Full-scale flow: 0.05slm ■ Full-scale flow: 50sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

Company：センシリオン
Price：Other

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Mass Flow Controller 'SFC5500-10slm'

Full-scale flow rate is 10 slm! A series that combines multiple gas calibrations and interchangeable fittings.

The "SFC5500-10slm" is a mass flow controller available as a standard product suitable for a wide range of applications. This product boasts superior performance equivalent to the "SFC5400," making it ideal for various applications in medical, analytical, and industrial environments. Additionally, a single unit can accommodate multiple flow ranges of conventional mass flow controllers. 【Specifications (partial)】 ■ Full-scale flow: 10slm ■ Full-scale flow: 10000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

Company：センシリオン
Price：Other

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Mass Flow Controller "SEC-Z4400 Series"

Suitable for a wide range of processes and applications! Ideal for refurbishing used equipment.

We handle the mass flow controller 'SEC-Z4400 series' manufactured by Horiba Stec, which complies with the RoHS directive and CE marking. The gas contact parts are made of metal, and it is equipped with a piezo valve. Additionally, compatibility with the fitting sizes and pin arrangements of the SEC-7300 and 4400 series is ensured. 【Features】 ■ Replacement and upgrade ■ High performance and high reliability ■ Flexibility ■ Compliance with RoHS directive and CE marking *For more details, please download the PDF or contact us.

Company：エーサット九州営業所
Price：Other

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Metal Seal Mass Flow Controller/ Meter "GF100 Series"

Applications for gas flow control with excellent response speed and repeatability.

The "GF100 Series" is a metal-sealed mass flow controller/meter that achieves high purity and ultra-high purity process gas supply with excellent response speed and repeatability. It ensures high repeatability and stable performance, providing reliability that exceeds industry standards. It achieves the highest level of gas cleanliness in the industry while enhancing process flexibility and efficiency, maximizing yield and productivity. 【Features】 ■ Long-term zero point stability: less than 0.5% full scale/year ■ Settling time: less than 700 ms - 1 second ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: surface finish options of 4µ or 10µ inch Ra ■ Corrosion-resistant Hastelloy(R) T-Rise sensor improves measurement reproducibility even with rising temperatures, among other features. *For more details, please download the PDF or feel free to contact us.

Company：ITWジャパン
Price：Other

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High-Temperature Mass Flow Controller "5850EMH Series"

Proven long-term stability! We provide ultra-high purification performance for high-temperature applications.

The "5850EMH Series" is a high-temperature mass flow controller with a metal seal that ensures high leak integrity and allows for flexible application support. By combining various options, it achieves advanced high-temperature gas measurement and control. At the core of this product is a highly stable sensor that displays electronic output signals and flow rates. This signal is used for display, recording, and control without the need for an automatic zero adjustment circuit. 【Features】 ■ High leak integrity (10-11 Pa.m3/s (10-10 atm.cc/s) He or less) ■ Wide flow range (0.003 to 100 slpm) ■ High-purity VAR 316L stainless steel ■ Prevents particle generation ■ Helium leak check port *For more details, please refer to the related link page or feel free to contact us.

Company：ITWジャパン
Price：Other

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マスフローコントローラ/メータ『GF40シリーズ』

デバイス1台でさまざまなガスと流量に対応し、柔軟な対応を実現しました！

『GF40シリーズ』は、当社独自のMultiFloテクノロジーを搭載したサーマル式のマスフローコントローラ/メータです。さまざまなガスを使用する場合、ガスの種類を頻繁に変更する場合、制御精度は維持したまま、フルスケールレンジを変更する必要のあるシステムやプロセスに好適です。 MultiFloテクノロジーは、比類のない柔軟性を提供します。 1台のデバイスで、数千パターンの異なるガス・流量範囲の組み合わせに対応しています。【特長】 ■専用のソフトウェアで設定変更が可能な、マルチガス/マルチレンジ機能 ■エラストマシールのオプションが豊富ため、さまざまなガスに対応 ■長期安定性に優れたハステロイ製センサを採用 ■実ガス試験に基づく100種類以上のガスデータを搭載 ■負荷の高いアプリケーションでも、1秒未満の応答時間とセットポイント　±1%の制御精度を実現 ※詳しくは関連リンクページをご覧いただくか、お気軽にお問い合わせ下さい。

Company：ITWジャパン
Price：Other

Flow Meter
Flow Control
Mass Flow Controller

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