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Mass flow controller Product List and Ranking from 18 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated： Aggregation Period:Sep 09, 2026～Oct 06, 2026
This ranking is based on the number of page views on our site.

Mass flow controller Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Sep 09, 2026～Oct 06, 2026
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. Fujikin Incorporated Tokyo//Machine elements and parts
  3. 日本スターテクノ Ibaraki//Industrial Electrical Equipment
  4. 4 ブロンコスト・ジャパン Tokyo//Industrial Electrical Equipment
  5. 5 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery
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Mass flow controller Product ranking

Last Updated： Aggregation Period:Sep 09, 2026～Oct 06, 2026
This ranking is based on the number of page views on our site.

  1. System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  2. Mass Flow Controller/ Meter "5850E Series" ITWジャパン
  3. Fujikin Inc. "Mass Flow Controller" Fujikin Incorporated
  4. 4 Thermal Mass Flow Controller/ Meter "SLA5800 Series" ITWジャパン
  5. 4 ALICAT Mass Flow Controller MCQ Series (High Pressure Type) 日本スターテクノ

Mass flow controller Product List

31～60 item / All 117 items

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Mass Flow Controller Trouble Case Collection

Mass Flow Controller Trouble Case Collection

Examples of troubles such as valve clogging in mass flow controllers are published!

The "Mass Flow Controller Trouble Case Collection" is a compilation of various troubles related to mass flow controllers, including incidents, causes, and responses. [Included Cases] ■ Valve clogging in mass flow controllers ■ Oil contamination in mass flow ■ Valve malfunction in mass flow ■ Mass flow controller not producing flow ■ Difficulty in mass flow, among others For more details, please refer to the catalog or feel free to contact us.

  • Flow Meter
  • Flow Control
  • Calibration and repair
  • Mass flow controller

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Mass flow controller, Alicat Corporation

Mass flow controller, Alicat Corporation

Standard features include a 100ms control response, high flow accuracy of ±(0.8% RD + 0.2% FS), analog output, and RS-232C communication.

★ Achieves fast response with the laminar flow method (differential pressure type). ★ Quickly follows flow rate changes. You can obtain the desired flow rate in a short time due to high-speed control response. ★ Flow rate settings can be made not only through front switch operation but also via analog input and RS-232C communication. ★ Standard equipped with mass flow rate 0-5VDC output. Options for 0-10VDC, 1-5VDC, and 4-20mADC are also available. Additionally, a second analog output can be added. ★ A wide range of models is available, from a small 0.5SCCM type to a large 5000SLPM type. ★ Capable of controlling 98 types of gases, including mixed gases, with a single unit. Gas selection can be easily performed using the front switch operation. For more details, please contact us or download the catalog.

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  • Flow Control
  • Other process controls
  • Mass flow controller

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Mass Flow Controller 'SFC6000D-50slm'

Mass Flow Controller 'SFC6000D-50slm'

Samples available in a short lead time of 8 weeks! The supply chain is robust.

The "SFC6000D-50slm" is a mass flow controller that demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. It is a highly attractive product with an excellent price-performance ratio and a short delivery time of 8 weeks for obtaining samples. Additionally, its very small and lightweight design allows for optimization of device size and weight, which is a decisive advantage, especially for portable devices. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Excellent performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Mass flow controller

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Mass Flow Controller "SFC5300"

Mass Flow Controller "SFC5300"

Introducing MFC for OEM projects with strict cost requirements for mass production!

The "SFC5300" is a mass flow controller capable of measuring and controlling mass flow with excellent accuracy, long-term stability, and reproducibility. Despite its compact size, it can measure over a wide dynamic range, and the body is made of metal. Additionally, the product features a down-mount connection for fluid connections and offers two digital interfaces for connectivity. 【Specifications (partial)】 ■ Full-scale flow: 1, 2, 5, and 10 slm ■ Full-scale flow: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

  • controller
  • Mass flow controller

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Mass Flow Controller "SFC5330"

Mass Flow Controller "SFC5330"

Excellent accuracy, long-term stability, and reproducibility! Achieving outstanding performance.

The SFC5330 is a mass flow controller that achieves a dynamic measurement range while being compact in size. It is a smaller version of the SFC5300, making it suitable for cost-sensitive mass production OEM projects. Additionally, a valve-less type is also available, which has the same performance characteristics and similar applications, allowing for combination use. 【Specifications (partial)】 ■ Full-scale flow rate: 1, 2, and 5 slm ■ Full-scale flow rate: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

  • controller
  • Mass flow controller

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Mass Flow Controller "SFC5400"

Mass Flow Controller "SFC5400"

The main body is made of metal! A version without a valve is also available.

The "SFC5400" is a versatile mass flow controller that can connect to various interfaces and fluid connections. It can measure a maximum flow rate from 50 sccm to 200 slm, and the sensor signal is calibrated on the chip and directly converted into a temperature-compensated digital signal. Additionally, it can store multiple gas calibration data in one device, allowing you to check whether the operating gas calibration value matches the actual gas being measured. 【Specifications (partial)】 ■ Full-scale flow rates: 1, 2, 5, 10, 20, 50, and 100 slm ■ Full-scale flow rates: 50, 100, 200, and 500 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector ports: Swagelok, VCO, VCR, Downmount *For more details, please download the PDF or feel free to contact us.

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  • Mass flow controller

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Mass Flow Controller "SFC5500-2slm"

Mass Flow Controller "SFC5500-2slm"

Utilizing CMOSens MEMS technology! Available as standard products suitable for a wide range of applications.

The "SFC5500-2slm" is a mass flow controller that does not drift and does not require recalibration in the market. It combines multiple gas calibrations and interchangeable fittings, making it available as a standard product suitable for a wide range of applications. Additionally, it is suitable for a variety of environments in medical, analytical, and industrial settings, and you can choose from standard pre-set variations. 【Specifications (partial)】 ■ Full-scale flow: 2 slm ■ Full-scale flow: 2000 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 8 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

  • controller
  • Mass flow controller

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Mass Flow Controller 'SFC5500-0.5slm'

Mass Flow Controller 'SFC5500-0.5slm'

A culmination of our 20 years of achievements in the precise control of gas flow!

The "SFC5500-0.5slm" is a mass flow controller that combines multiple gas calibrations and interchangeable fittings. This product is based on the microthermal measurement principle and utilizes our proven CMOSens MEMS technology. Additionally, unlike other products on the market, it does not drift and does not require recalibration in the market. 【Specifications (partial)】 ■ Full scale flow rate: 0.5slm ■ Full scale flow rate: 500sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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  • Mass flow controller

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Mass Flow Controller "SFC5500-200slm"

Mass Flow Controller "SFC5500-200slm"

Utilizing CMOSens MEMS technology! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-200slm" is a mass flow controller that can accommodate multiple flow ranges in a single product. It can be obtained as a standard product suitable for a wide range of applications by combining multiple gas calibrations and interchangeable fittings. Additionally, it does not drift and does not require recalibration in the market. Please feel free to contact us when you need assistance. 【Specifications (partial)】 ■ Full-scale flow: 200slm ■ Full-scale flow: 200000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, and N2 flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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  • Mass flow controller

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Liquid and precursor MFC "ARI7000s"

Liquid and precursor MFC "ARI7000s"

We will build a product portfolio with domestic technology! Providing total solutions for mass flow.

The "ARI7000s" is a domestically developed liquid and precursor MFC that is manufactured based on unique sensor technology, allowing for precise control of liquid flow. This product possesses proprietary liquid sensor and valve development technologies, as well as vaporizer-linked valve development technology. This enables the development and mass production of various precursors. [Features] - Manufactured based on unique sensor technology - Supports development and mass production of various precursors - Controls liquid flow - Development technology for liquid sensors, valves, and vaporizer-linked valves *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Mass flow controller

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Mass Flow Controller "1000 Series"

Mass Flow Controller "1000 Series"

Suppresses overshoot at startup! High-performance gas flow controller at a low price.

The "1000 Series" is a high-performance gas flow controller that specializes in the basic functions of mass flow controllers, designed as an analog low-cost model. It can be used in a wide range of fields such as various analyses, film formation, physical and chemical experiments, and manufacturing applications. Additionally, we offer a dedicated power supply "PA01" with a simple design that only includes flow rate setting and display, making it easy to operate. 【Features】 ■ Low cost ■ Compact size ■ Suppresses overshoot at startup ■ Valve type: Normally open ■ Flow control range: 5–100% F.S. *For more details, please refer to the PDF materials or feel free to contact us.

  • Other process controls
  • Mass flow controller

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Coriolis mass flow controller/meter "QuantimQMC"

Coriolis mass flow controller/meter "QuantimQMC"

The new 3rd generation Quantim QMC Coriolis flow meter is suitable for applications involving the measurement and control of small flow rates of gases and liquids.

The Quantim® QMC Coriolis mass flow controller and meter provide extremely accurate, stable, and reproducible measurement and control for very low flow rates of gases and liquids. This third-generation new Quantim QMC Coriolis mass flow controller and meter contribute to shortening the scale-up period from lab to pilot plant to production by enhancing process quality, production yield, and throughput. The new Quantim QMC Coriolis mass flow series is compatible in terms of mounting dimensions and functionality with the old models of Quantim from Brooks Instrument. 【Features】 ■ True mass flow measurement ■ Accurate density measurement ■ Additional I/O options: 0-10 Vdc, 0-20 mA, RS485 S-Protocol ■ A wide range of seal materials, certificates, and certification options ■ Easily accessible service port *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
  • Flow Control
  • Mass flow controller

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Mass Flow Controller/ Meter "5850E Series"

Mass Flow Controller/ Meter "5850E Series"

Excellent long-term stability, maintaining production accuracy! We perform highly reliable, precise, and repeatable measurements and controls.

The "5850E Series" is an elastomer-sealed thermal mass flow controller/meter. This series has a proven track record of being actively used in thousands of applications worldwide for several decades, equipped with a unique stable flow sensor that provides high reliability, accuracy, and repeatability necessary for the demanding industrial production processes of today. 【Features】 ■ Removable flow sensor ■ No influence from mounting position ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
  • Flow Control
  • Mass flow controller

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Mass Flow Controller/ Meter "SLAMf Series"

Mass Flow Controller/ Meter "SLAMf Series"

Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

Dust, humidity, extreme temperatures, moisture, and other harsh conditions—no matter the environment, the 'SLAMf Series' elastomer seal thermal mass flow controllers/meters achieve high precision and long-term stability unique to the proven 'SLA5800 family' of meters and controllers. The specially designed NEMA4X/IP66 rated enclosure protects advanced digital electronic components, enabling stable and accurate measurement and control of gas/fluid mass flow essential for processes. 【Features】 ■ High durability enclosure rated NEMA4X / IP66 ■ Wide range of rated flow - from 0.003 to 2500 slpm ■ Compatible with a wide range of temperature and pressure conditions ■ Achieves excellent accuracy ■ Configurable multi-gas/multi-range functionality *For more details, please refer to the related link page or feel free to contact us.

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  • Flow Meter
  • Flow Control
  • Mass flow controller

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Metal Seal Mass Flow Controller/ Meter "GF125 Series"

Metal Seal Mass Flow Controller/ Meter "GF125 Series"

MFC that makes everything possible

The "GF125 Series," equipped with ultra-fast response times and high levels of cleanliness, is a second-generation multivariable measurement, PTI (Pressure Variation Resistance) metal-sealed mass flow controller. It minimizes fluctuations in process gas flow due to variations in pressure and temperature. With standard MultiFlo technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. As a result, it reduces the need for pressure regulators, pressure transducers, and related hardware installations at each point, thereby shrinking the size and cost of gas panels while maximizing yield and productivity with industry-leading PTI performance. 【Features】 ■ Long-term zero stability: less than 0.5% full scale/year ■ Settling time: less than 300 ms - 700 ms ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: 4µ inch Ra surface finish ■ SEMI F20 compliant materials for gas and liquid contact parts ■ Corrosion-resistant Hastelloy® T-Rise sensor, etc. *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Flow Meter
  • Mass flow controller

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Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Safety Controller
  • Flow Meter
  • Flow Control
  • Mass flow controller

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Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>

Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>

Thin films, coatings, and surface treatments cover a wide range of industries and applications!

Surfaces of industrial and consumer products may be coated to optimize their finish. For example, it is possible to improve the wear resistance of cutting tools, scratch resistance of glass, thermal properties of plate glass, and aesthetics of household appliances. There are various coating methods such as chemical vapor deposition, physical vapor deposition, plasma treatment processes, and thermal spraying, but they are often performed as the final stage of the manufacturing process. Brooks Instrument's mass flow, vacuum, pressure measurement, and control devices cover PVD and CVD process applications. Additionally, our products are suitable for surface treatment applications such as heat treatment and plasma processing. 【Features】 ■ High reproducibility and precision gas supply ■ Excellent quality, accurate thickness, and uniform film thickness ■ Long-term stable process control ■ High-functionality flow diagnostics and trend analysis in the field to maximize process yield *For more details, please refer to the PDF document or feel free to contact us.

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  • Flow Meter
  • Flow Control
  • Mass flow controller

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GF Series Product Comparison / Selection Guide

GF Series Product Comparison / Selection Guide

Achieving optimal gas flow control for environmental and energy processes.

In the fields of environment and energy, such as CO₂ utilization technology, exhaust gas treatment, and fuel evaluation, high-precision gas flow control tailored to specific applications is required. The GF series accommodates a wide range of applications, from multi-gas and multi-range evaluations to high-purity gases and high-temperature processes. It allows for the selection of the optimal model based on process conditions, achieving stable flow control from research and development to production processes. [GF40] MultiFlo compatible / Suitable for multi-gas and multi-range evaluation □ Ideal for research and development and evaluation tests □ Supports multiple gases and multiple ranges with a single unit □ Contributes to shortening development time and improving equipment efficiency [GF100] MultiFlo compatible / Suitable for high-purity and multi-condition processes □ Compatible with high-purity gas processes □ High-precision control across a wide range of process conditions □ Also ideal for semiconductor and research and development applications [GF120xHT] Suitable for high-temperature and corrosion-resistant processes □ Supports high-temperature gas supply □ Excellent corrosion-resistant design □ Achieves stable flow control even in harsh process environments *For more details, please refer to the PDF materials. Inquiries are also welcome.

  • Flow Meter
  • Flow Control
  • Mass flow controller

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[New Product] AMF Series (Small Mass Flow Controller/Meter)

[New Product] AMF Series (Small Mass Flow Controller/Meter)

Support for liquid fluid management in environmental, bio, and materials processes through non-contact liquid monitoring, high-precision Coriolis measurement, and the use of software.

Achieving compact design and high-precision control. Contributing to miniaturization and high performance of devices. The AMF series is a compact mass flow controller/meter that realizes high-precision flow control even in limited installation spaces. With excellent responsiveness and stable flow control, it caters to a wide range of applications from research and development to manufacturing equipment. It contributes to space-saving designs and increased design flexibility of devices. ■ Benefits of Introduction Increased design flexibility of devices due to compact design High-precision and high-response flow control Miniaturization and lightweight of devices Improved quality through stable process control ■ Main Applications Analytical and measurement instruments Research and development equipment OEM devices Bio and life sciences fields General industrial gas supply systems Brooks Instrument provides optimal solutions for your applications and processes based on over 70 years of technology and rich experience in the field of precision fluid measurement and control. Even in the development of devices requiring miniaturization and high performance, we support our customers with high-quality products and comprehensive technical support. *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
  • Other measurement, recording and measuring instruments
  • Mass flow controller

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Brooks Instrument "Gas Flow Control" Lineup

Brooks Instrument "Gas Flow Control" Lineup

High-precision gas flow control solutions that support the development of decarbonization and environmental technologies.

In the field of environment and energy, high-precision gas flow control tailored to specific applications is required for CO₂ reduction technologies, exhaust gas treatment, and alternative fuel research and development. Brooks Instrument offers optimal mass flow controllers/meters for each stage, from research and development to demonstration testing and production processes. We propose the best products according to application and process conditions. ■ For applications and challenges like these: Research and development of CO₂ reduction and CCUS technologies Exhaust gas treatment and environmental impact reduction Catalyst evaluation and reaction process development Research and development of alternative fuels and synthetic fuels Fuel cell and hydrogen-related processes Gas flow control for furnaces, heat treatment, and material processes *For more details, please refer to the related catalog or feel free to contact us.

  • Flow Control
  • Other flow meters
  • Mass flow controller

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GC Series Selection and Specification Consultation Guide | For Research and Development and Small Devices

GC Series Selection and Specification Consultation Guide | For Research and Development and Small Devices

Research and development of gas flow control for small devices, made more compact.

Mass Flow Controller for Research and Development / Compact Devices Achieving miniaturization and high-precision control. Broadly applicable from research and development to environmental and energy fields. The GC series is an ultra-compact mass flow controller that employs MEMS sensors. It achieves high precision, fast response, and excellent reproducibility even in limited installation spaces, enhancing the design flexibility of analytical instruments, research and development equipment, and compact OEM devices. ■ For those facing the following challenges: - Miniaturization and lightweighting of devices - Integration of high-performance flow control equipment into limited spaces - High precision and reproducibility in flow control for evaluation tests and experiments - Stable flow control for multiple gases - Replacement of existing MFCs with compact, low-power models *For more details, please refer to the catalog or feel free to contact us.

  • Flow Meter
  • Other inspection equipment and devices
  • Mass flow controller

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Selection Guide: CCUS, Methanation, Synthetic Fuels

Selection Guide: CCUS, Methanation, Synthetic Fuels

Supply CO₂ and H₂ according to the reaction conditions. Explain flow control from research to demonstration and production facilities.

In the research and development of CCUS, methanation, and synthetic fuels, it is important to stably supply raw gases such as CO₂ and H₂ according to the set reaction conditions. Furthermore, as research progresses to demonstration and production facilities, the required flow rate range, pressure, temperature, fluid, and installation environment also change. We will organize the key points of flow control in each process, including raw gas supply, mixing/dilution, catalytic reactions, temperature/pressure condition testing, pilot facilities, and liquid raw material supply. We will introduce the selection methods for mass flow controllers/meters according to applications and conditions, as well as the differentiation of AMF, SLA5800, SLAMf, and QMC. Please utilize this information for the new design of research and evaluation facilities, as well as for product selection during scale-up to demonstration and production facilities. ■ For those facing such challenges: - Stabilization of CO₂ and H₂ mixing ratios - Improvement of reproducibility in catalyst evaluation and reaction testing - Flow control in evaluation facilities using multiple gases - Response to harsh conditions such as high pressure and high temperature - High-precision control of liquid raw materials and reaction liquids - Scale-up from research to demonstration facilities

  • Flow Meter
  • Flow Control
  • Other environmental equipment
  • Mass flow controller

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High-performance mass flow controller MC-3000L series

High-performance mass flow controller MC-3000L series

This is a high-performance digital mass flow controller that employs our proprietary self-temperature compensation method (patented in the U.S. and Japan).

This is a digital mass flow controller that achieves high precision of 1.0% S.P. with its unique patented technology and is compatible with various surface mount standards (1.125 inches). 【Features】 ○ High-performance 1.125-inch size digital mass flow controller (piezo valve, high precision (S.P. guaranteed), digital control) ○ Maintains compatibility with analog mass flow controllers ○ Universal interface RS485 is available ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Compatible with various surface mount standards of SEMI STD. *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control
  • Mass flow controller

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Variable Range Compatible Mass Flow Controller MC-700

Variable Range Compatible Mass Flow Controller MC-700

It is a mass flow controller that supports multi-range while being low-cost.

This is a mass flow controller that can be changed for various gases and ranges using the rotary switch located on the upper part of the MFC. 【Features】 ○ Short delivery time model ○ Equipped with high-speed, high-performance piezo actuator ○ Universal interface RS485 is available ○ Standard ultra-clean specification with metal seals and precision polished inner surfaces ○ Various gases and ranges can be changed using the rotary switch *For other functions and details, please download the catalog.

  • Piping Materials
  • Vacuum Equipment
  • Flow Control
  • Mass flow controller

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High-speed response mass flow controller "MC-7000 Series"

High-speed response mass flow controller "MC-7000 Series"

Adopts Au seal and piezo actuators! Compatible with various digital interfaces.

The "MC-7000 Series" is a high-speed response mass flow controller that achieves a response time of less than 200 msec with a thermal sensor. By adopting Lintec's unique self-temperature compensation method, it can handle corrosive gases and liquefied gases, ensuring a flow accuracy of ±1.0% S.P. It also supports various digital interfaces such as DeviceNet and EtherCAT. 【Features】 ■ Uses Au seals and piezo actuators ■ Achieves a response time of less than 200 msec with a thermal sensor ■ Adopts Lintec's unique self-temperature compensation method ■ Compatible with corrosive gases and liquefied gases ■ Guarantees flow accuracy of ±1.0% S.P. *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Control
  • Weighing Control
  • Mass flow controller

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MODEL EX-550 SERIES

MODEL EX-550 SERIES

Introducing metal seal digital mass flow controllers/meters for N2, Air, H2, and more!

The "MODEL EX-550 SERIES" is a metal-sealed digital mass flow controller/meter that allows for gas type switching via a rotary switch. It enables high-precision measurement with S.P. accuracy, and the entire flow control range responds within 1 second. It features RS485 communication capabilities and allows for the selection of analog input/output of 0-5VDC/4-20mA and power supply of ±15VDC/24VDC. 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: 10 SCCM to 5 SLM ■ Accuracy: ±1% S.P. (25-100% F.S.), ±0.25% F.S. (up to 25% F.S.) ■ High-precision measurement is possible with S.P. accuracy ■ Gas type switching is possible via a rotary switch *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter
  • Mass flow controller

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MODEL 8700 SERIES

MODEL 8700 SERIES

Integrated display type with various functions available! Introducing mass flow controllers/meters.

The "MODEL 8700 SERIES" is a mass flow controller/meter with a display that accommodates a wide range of flow rates. Various functions (instantaneous/integrated flow display, alarm settings) are available. The target fluids include gases such as N2, Air, H2, He, Ar, O2, and CO2. Additionally, it features RS485 communication capabilities and analog input/output of 0-5VDC (which can be changed to 4-20mA). 【Features】 ■ Target fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM when converted to N2) ■ Analog input/output can be changed via the display (0-5VDC at the time of shipment) *For more details, please refer to the PDF document or feel free to contact us.

  • Flow Meter
  • Mass flow controller

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