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Mass flow controller Product List and Ranking from 16 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated： Aggregation Period:Feb 25, 2026～Mar 24, 2026
This ranking is based on the number of page views on our site.

Mass flow controller Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Feb 25, 2026～Mar 24, 2026
This ranking is based on the number of page views on our site.

  1. ITWジャパン Tokyo//Machine elements and parts
  2. Fujikin Incorporated Tokyo//Machine elements and parts
  3. ブロンコスト・ジャパン Tokyo//Industrial Electrical Equipment
  4. 4 コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡 Kyoto//Industrial Machinery
  5. 5 リンテック 東京営業所 Tokyo//Machine elements and parts
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Mass flow controller Product ranking

Last Updated： Aggregation Period:Feb 25, 2026～Mar 24, 2026
This ranking is based on the number of page views on our site.

  1. Realizing Precision Control in Energy Innovation <Application Case Introduction> ITWジャパン
  2. Fujikin Inc. "Mass Flow Controller" Fujikin Incorporated
  3. System [Flow Control Device] FCS Thermal Series Fujikin Incorporated
  4. 4 System [Flow Control Device] FCS Pressure Series Fujikin Incorporated
  5. 5 Mass Flow Controller/ Meter "SLAMf Series" ITWジャパン

Mass flow controller Product List

61～90 item / All 96 items

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ALICAT Mass Flow Controller MCE Series SEMI Standard

ALICAT Mass Flow Controller MCE Series SEMI Standard

Mass flow controller with built-in valve from ALICAT, compliant with SEMI standards.

The "MCE/MCES series" is a mass flow controller manufactured by ALICAT, featuring a built-in valve that complies with SEMI standards. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments
  • Mass flow controller

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ALICAT High-Precision Mass Flow Controller for Bioreactors

ALICAT High-Precision Mass Flow Controller for Bioreactors

AriCat BIO Series! Reliable, adaptable, and compatible flow control.

The 【BIO Series】 is a mass flow controller manufactured by ALICAT that features a laminar flow method (differential pressure type) with a fast response time of 10 ms. - Long-term stability: Extremely low zero drift - Assurance against process water contamination - High contrast, clear display - ASME (American Society of Mechanical Engineers) recommended: 316L stainless steel and USP Class VI, FDA (Food and Drug Administration) grade elastomers - Gas selection switching possible without recalibration and without loss of accuracy - Industrial Ethernet - Wide range flow: 1 SCCM to 5000 SLPM - Response speed of 10 ms enables high-speed data recording - Flexible process connection (SAE standard)

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High-pressure Smart Series Mass Flow Controller SLA5850

High-pressure Smart Series Mass Flow Controller SLA5850

Equipped with both analog and digital interfaces.

A mass flow controller capable of handling ultra-high pressure specifications up to 30MPa, thanks to its distinctive valve structure.

  • Flow Control
  • Mass flow controller

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Thermal liquid mass flow controller

Thermal liquid mass flow controller

Adopting a through-type sensor.

Mass flow controller for liquids based on a new thermodynamic principle sensor design (international patent).

  • Flow Control
  • Mass flow controller

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Coriolis mass flow controller for liquids and gases

Coriolis mass flow controller for liquids and gases

Adoption of a groundbreaking design (patented) Coriolis mass flow sensor.

A mass flow controller for liquids and gases that offers unparalleled high precision and zero stability in the field of small flow liquids, which are considered difficult to measure.

  • Flow Control
  • Mass flow controller

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Mass Flow Mass Flow Controller REC-2324 TYPE

Mass Flow Mass Flow Controller REC-2324 TYPE

This is a 24V powered single supply mass flow controller that matches general industrial equipment.

In terms of structure, it is of a magnetic tracking type, which follows the movement of the float inside the metal tapered tube and accurately indicates it externally.

  • Flow Meter
  • Flow Control
  • Mass flow controller

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Thermal Mass Flow Controller EL-FLOW Base

Thermal Mass Flow Controller EL-FLOW Base

A new mass flow controller that pursues cost reduction and flexibility in various applications.

The EL-FLOW Base series mass flow controllers are low-cost models that incorporate the latest technology from Bronkhorst while focusing on standard features to keep prices down. They are first-response mass flow controllers developed specifically for OEM applications. They provide accurate measurement and stable control for general gas applications. The EL-FLOW Base offers a very economical cost solution, especially for installation in OEM equipment. In addition to the previous F-201CB and F-201AB models, the F-202BB with a maximum flow rate of 200 ln/min Air has been added. For more details, please download and view the catalog.

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  • Flow Meter
  • Mass flow controller

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mini CORI-FLOW mass flow controller (flow meter)

mini CORI-FLOW mass flow controller (flow meter)

Mass flow controller with high-speed control capability due to fast sensor response.

The "mini CORI-FLOW(R) mass flow controller (flow meter)" features high stability control output and fast response. Due to the fast sensor response (50…200 msec), high-speed control has become possible. Therefore, applications such as split delivery can be expected. 【Features】 ○ Directly connected control valve ○ Fast response For more details, please contact us or download the catalog.

  • Flow Meter
  • Flow Control
  • Mass flow controller

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Application of mini CORI-FLOW (Pump System Case 2)

Application of mini CORI-FLOW (Pump System Case 2)

[Pump System Case 2] Supercritical Gas Measurement and Control

Fluids near the supercritical region; measuring substances like carbon dioxide (CO2) and ethylene (C2H4) is not easy. For example, carbon dioxide CO2 enters the critical region when the temperature exceeds 20°C and the pressure is around 30 bara. Under such conditions, the physical properties, such as density and specific heat, change rapidly as a result of temperature and pressure variations. Therefore, measuring these fluids using thermal methods becomes very difficult. The "Mini CORI-FLOW(R)" provides true mass flow measurement regardless of physical properties, thus solving these issues all at once. 【Application Examples】 ○ Measures the mass of the molecules themselves, whether the fluid is in gas, liquid, or at their boundary. ○ This measurement principle has been field-validated to provide high precision and stable measurements. For more details, please contact us or download the catalog.

  • Flow Control
  • Other pumps
  • Other process controls
  • Mass flow controller

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Mass Flow Meter and Mass Flow Controller Comprehensive Catalog

Mass Flow Meter and Mass Flow Controller Comprehensive Catalog

Overwhelming share in Europe! Covers a wide flow range for both liquids and gases! Comprehensive catalog of mass flow measurement and control equipment available now!

This is the comprehensive catalog of mass flow meters and mass flow controllers handled by Bronkhorst Hi-Tech, which boasts an overwhelming share in the field of flow measurement and control in Europe. You are sure to find a wide range of devices that combine the necessary accuracy and flow range for your purposes. Since 1981, we have been developing high-precision products that cover a wide range from micro to large flow, primarily focusing on thermal and Coriolis types. Our products are adopted in R&D and industrial sectors around the world. Our Coriolis products specialized for small flow areas are also noteworthy. 【For those facing these issues】 ■ Want to improve reproducibility during temperature and pressure fluctuations ■ Instruments take up too much space ■ Want to reduce recalibration every time the liquid changes 【Contents included】 ○ EL-FLOW series ○ IN-FLOW series ○ EX-FLOW series ○ LOW-ΔP-FLOW series ○ EL-PRESS series ○ OEM solutions ○ LIQUI-FLOW series, etc. ◆ For other functions and details, please download the catalog.

  • Flow Control
  • Mass flow controller

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Mass Flow Controller EL-FLOW Classic

Mass Flow Controller EL-FLOW Classic

Ideal for OEMs. A thermal digital mass flow controller dedicated to analog I/O, pursuing cost reduction and flexibility for various applications.

The EL-FLOW Classic series digital mass flow controllers are models that focus on the fundamental functions of flow measurement and control while incorporating Bronkhorst's latest technology at a competitive price. They are compatible with analog I/O (not supporting digital communication) and are available only for standard gases (Air, N2, H2, O2, He, Ar, CO, CO2, N2O, CH4), which helps to shorten delivery times. For more details, please refer to the catalog or contact us.

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  • Flow Meter
  • Mass flow controller

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LOW-ΔP-FLOW Mass Flow Controller for Low Pressure Loss and Corrosive Gases

LOW-ΔP-FLOW Mass Flow Controller for Low Pressure Loss and Corrosive Gases

It is a mass flow meter and controller that is resistant to clogging and has low pressure loss. It is suitable for corrosive gases as well. It is equipped with a specially designed sensor and laminar flow element.

The LOW-ΔP-FLOW series is a mass flow meter/controller developed by Bronkhorst Hi-Tech for low-pressure loss applications. It features a low-pressure loss sensor and laminar flow element, making it ideal for operation at low differential pressures. Minimum range: 0.2...10 mln/min Maximum range: 20...1000 m3n/h Features: - Extremely low pressure loss - Structure that is resistant to clogging and easy to purge - Industrial-grade housing available (IP65) The low-pressure loss mass flow controller LOW-ΔP-FLOW has a compact design, with the flow meter and control valve integrated into a single body. The maximum flow capacity of these compact models is 1...50 ln/min (air-based), depending on operating conditions. For large flow control at low differential pressures, it is offered in combination with a pressure-compensated bellows valve and a low-pressure loss type flow meter (integrated into the controller). Additionally, the equipment can support various fieldbus protocols by adding a compact communication PCB: DeviceNetTM, Profibus-DP(R), EtherCAT, Modbus, or FLOW-BUS protocol.

  • Flow Meter
  • Flow Control
  • valve
  • Mass flow controller

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mini CORI-FLOW mass flow controller (flow meter)

mini CORI-FLOW mass flow controller (flow meter)

Mass flow controller with high-speed control capability due to fast sensor response *Exhibited at the Nano Society Conference.

The "mini CORI-FLOW(R) mass flow controller (flow meter)" features high stability control output and fast response. Due to the fast sensor response (50…200 msec), high-speed control has become possible. Therefore, applications such as split delivery can be expected. 【Features】 ○ Directly connected control valve ○ Fast response ★ We will be exhibiting at the 16th Nano Society Conference! Date: May 10 (Thursday) to May 12 (Saturday), 2018 Venue: The University of Tokyo, Asano Campus, Takeda Advanced Research Building, Takeda Hall, 5th Floor We hope you can join us for this opportunity. For more details, please contact us or download the catalog.

  • Flow Meter
  • Flow Control
  • Mass flow controller

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Mass Flow Controller 'SFC6000D-5slm'

Mass Flow Controller 'SFC6000D-5slm'

The supply chain is robust because the number of electronic components used is very small! For semiconductors, analytical instruments, and medical devices.

The SFC6000D-5slm is a highly attractive mass flow controller with an excellent price-performance ratio and a delivery time of 8 weeks. Its small and lightweight design allows for optimization of device size and weight, providing a decisive advantage, especially for portable devices. Furthermore, it demonstrates outstanding performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Mass flow controller

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Mass Flow Controller 'SFC6000D-20slm'

Mass Flow Controller 'SFC6000D-20slm'

Excellent price-performance ratio! This is a very attractive product with a delivery time of 8 weeks.

The "SFC6000D-20slm" is a mass flow controller that is very small and lightweight, allowing for optimization of the device's size and weight. Due to advanced integration and a very low number of electronic components used, the supply chain is robust. Furthermore, it demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, enabling optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Robust supply chain due to the very low number of electronic components used *For more details, please download the PDF or feel free to contact us.

  • Flow Control
  • Mass flow controller

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Mass Flow Controller 'SFC5500-50sccm'

Mass Flow Controller 'SFC5500-50sccm'

Combined multiple gas calibrations and interchangeable fittings! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-50sccm" is a mass flow controller based on micro-thermal measurement principles. It utilizes proven CMOSens MEMS technology, ensuring no drift and eliminating the need for recalibration in the market. Additionally, its wide range of flow control capabilities allows a single product to accommodate multiple flow ranges. 【Specifications (partial)】 ■ Full-scale flow: 0.05slm ■ Full-scale flow: 50sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

  • controller
  • Mass flow controller

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Mass Flow Controller 'SFC5500-10slm'

Mass Flow Controller 'SFC5500-10slm'

Full-scale flow rate is 10 slm! A series that combines multiple gas calibrations and interchangeable fittings.

The "SFC5500-10slm" is a mass flow controller available as a standard product suitable for a wide range of applications. This product boasts superior performance equivalent to the "SFC5400," making it ideal for various applications in medical, analytical, and industrial environments. Additionally, a single unit can accommodate multiple flow ranges of conventional mass flow controllers. 【Specifications (partial)】 ■ Full-scale flow: 10slm ■ Full-scale flow: 10000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

  • controller
  • Mass flow controller

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Mass Flow Controller "SEC-Z4400 Series"

Mass Flow Controller "SEC-Z4400 Series"

Suitable for a wide range of processes and applications! Ideal for refurbishing used equipment.

We handle the mass flow controller 'SEC-Z4400 series' manufactured by Horiba Stec, which complies with the RoHS directive and CE marking. The gas contact parts are made of metal, and it is equipped with a piezo valve. Additionally, compatibility with the fitting sizes and pin arrangements of the SEC-7300 and 4400 series is ensured. 【Features】 ■ Replacement and upgrade ■ High performance and high reliability ■ Flexibility ■ Compliance with RoHS directive and CE marking *For more details, please download the PDF or contact us.

  • controller
  • Mass flow controller

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High-Temperature Mass Flow Controller "5850EMH Series"

High-Temperature Mass Flow Controller "5850EMH Series"

Proven long-term stability! We provide ultra-high purification performance for high-temperature applications.

The "5850EMH Series" is a high-temperature mass flow controller with a metal seal that ensures high leak integrity and allows for flexible application support. By combining various options, it achieves advanced high-temperature gas measurement and control. At the core of this product is a highly stable sensor that displays electronic output signals and flow rates. This signal is used for display, recording, and control without the need for an automatic zero adjustment circuit. 【Features】 ■ High leak integrity (10-11 Pa.m3/s (10-10 atm.cc/s) He or less) ■ Wide flow range (0.003 to 100 slpm) ■ High-purity VAR 316L stainless steel ■ Prevents particle generation ■ Helium leak check port *For more details, please refer to the related link page or feel free to contact us.

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マスフローコントローラ/メータ『GF40シリーズ』

マスフローコントローラ/メータ『GF40シリーズ』

デバイス1台でさまざまなガスと流量に対応し、柔軟な対応を実現しました！

『GF40シリーズ』は、当社独自のMultiFloテクノロジーを搭載したサーマル式のマスフロー コントローラ/メータです。 さまざまなガスを使用する場合、ガスの種類を頻繁に変更する場合、制御精度は維持したまま、 フルスケールレンジを変更する必要のあるシステムやプロセスに好適です。 MultiFloテクノロジーは、比類のない柔軟性を提供します。 1台のデバイスで、数千パターンの異なるガス・流量範囲の組み合わせに対応しています。 【特長】 ■専用のソフトウェアで設定変更が可能な、マルチガス/マルチレンジ機能 ■エラストマシールのオプションが豊富ため、さまざまなガスに対応 ■長期安定性に優れたハステロイ製センサを採用 ■実ガス試験に基づく100種類以上のガスデータを搭載 ■負荷の高いアプリケーションでも、1秒未満の応答時間とセットポイント 　±1%の制御精度を実現 ※詳しくは関連リンクページをご覧いただくか、お気軽にお問い合わせ下さい。

  • Flow Meter
  • Flow Control
  • Mass flow controller

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Mass Flow Controller/ Meter "4800 Series"

Mass Flow Controller/ Meter "4800 Series"

Ultra-fast response for flow processes focused on speed! Suitable for a wide variety of non-corrosive gases.

The "4800 Series" is a thermal mass flow controller/meter with elastomer seals that improves process efficiency and productivity as response time improves. The advanced MEMS thermal sensor is equipped with a dedicated PID algorithm optimized for response to the control valve, allowing the product to quickly follow the actual flow rate even when the set point is changed arbitrarily. 【Features】 ■ Flow response time (settling time) of 0.75 seconds or less ■ Innovative MEMS sensor and dedicated PID algorithm ■ Compact size, half that of conventional thermal MFCs ■ Digital compatibility via RS-232 ■ Optional Local Operator Interface (LOI) to streamline setup and operation *For more details, please refer to the related link page or feel free to contact us.

  • Flow Meter
  • Flow Control
  • Mass flow controller

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Pressure-based mass flow controller "GP200 series"

Pressure-based mass flow controller "GP200 series"

Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and places the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. 【Features】 ■ Reduction of measurement error ■ Suitable for all process conditions ■ High-precision flow control ■ Reduces valve leakage to 1/100 *For more details, please contact us.

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Auto Pressure Controller "SLA/SLAMf Series"

Auto Pressure Controller "SLA/SLAMf Series"

Automate pressure control and use it as a pressure/back pressure regulator!

The Auto Pressure Controller "SLA/SLAMf Series" is equipped with a wealth of options and features. By combining the SLA/SLAMf series mass flow controllers and meters, you can achieve consistency in control (process) with the advantages of a single platform. The SLA/SLAMf series uses a primary flow calibration system that is traceable to international standards, characterized by high precision, long-term stability of the zero point, and excellent reproducibility based on our superior measurement systems and methods.

  • DS-PR-SLA5800-SLAMf-Series-RevB-PC-RT-ipn201701.jpg
  • Pressure Control
  • Mass flow controller

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Mass Flow Controller/ Meter "GF40 Series" and two other products.

Mass Flow Controller/ Meter "GF40 Series" and two other products.

Mass flow controller/meters that support multiple gases with a single device. A compact readout unit that can connect up to four devices is also introduced.

The "GF40 Series" is a mass flow controller/meter that supports multiple gases with a single unit, enhancing process flexibility and productivity. Equipped with the manufacturer's unique "MultiFlo Technology," it enables high-precision flow control and measurement, making it suitable for systems that use diverse gases. It excels in processes and facilities where the type of gas is frequently changed or where it is necessary to readjust the range while maintaining measurement and control accuracy. Additionally, the "0254" is a readout unit equipped with an RS232 serial port, in addition to power supply and analog control functions. Compliant with the RoHS directive, it offers user-friendly operability. There are installation options that allow for easy installation in various applications, providing power to up to four Brooks mass flow or pressure devices. 【Features】 ◎ "GF40 Series" ■ Equipped with abundant actual gas data ■ Capable of changing gas types and flow ranges, allowing one unit to accommodate various research themes ◎ "0254" ■ Flow settings support instantaneous control and batch control, with flow display options for instantaneous and cumulative readings ■ Space-saving design allows for connection of up to four mass flow controllers/meters

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  • Electrical Instruments/Electrometers
  • Mass flow controller

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Flow, pressure, steam, and vacuum products "Comprehensive Catalog" *Includes flow meters and more!

Flow, pressure, steam, and vacuum products "Comprehensive Catalog" *Includes flow meters and more!

The lineup also includes Coriolis mass flow meters and our company's first pressure-based mass flow controllers.

This document is a comprehensive catalog featuring Brooks Instrument's flow, pressure, steam, and vacuum products. It includes pressure controllers such as the "SLA Series," which eliminates closed-loop, boost, and hysteresis, as well as thermal mass flow devices like the "GF40 Series," which can cover multiple gas types and flow ranges with a single unit, along with area flow meters, pressure/vacuum products, and more. This is a very informative book, so please take a look when considering implementation. 【Contents】 ■ Mass Flow & Pressure Controllers ■ Area Flow Meters ■ Pressure/Vacuum Products ■ Secondary Electronics & Software ■ Communication Protocols ■ Service & Support *For more details, please download the PDF or feel free to contact us.

  • Safety Controller
  • Pressure Control
  • Flow Meter
  • Mass flow controller

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Realizing Precision Control in Energy Innovation <Application Case Introduction>

Realizing Precision Control in Energy Innovation <Application Case Introduction>

Solutions that support a sustainable future

Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. Supporting the energy of the future, there is technology that monitors the precise flow on-site. Brooks Instrument's flow meters support the energy transition. Equipped with gas control and measurement functions useful for carbon-neutral research and development, we offer the thermal mass flow controller/meter "SLA5800 Series," as well as the elastomer-sealed thermal mass flow controller/meter "SLAMf Series," which achieves high accuracy and long-term stability even under the most demanding conditions. Please feel free to contact us when you need assistance. 【SLA5800 Series Features】 ■ Obtained type approval certificate for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Covers a wide range of flow rates ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please download the PDF or feel free to contact us.

  • Flow Meter
  • Mass flow controller

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24/7 Support "Worldwide Support"

24/7 Support "Worldwide Support"

This is a support service for customers using Bronco products. You can use our service line available 24 hours a day, 7 days a week.

This is a service system for customers using Bronco products. Thanks to our global service network, we can also provide support at night.

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[English Market Research Report] Global Market for Mass Flow Controllers

[English Market Research Report] Global Market for Mass Flow Controllers

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The mass flow controller market size is expected to reach 3 billion USD by 2030, with a projected market growth of 8.3% CAGR during the forecast period. In 2022, the market reached a volume of 1,980,600 units, achieving a growth of 8.1% (2019-2022). Furthermore, alternative energy sources often rely on precise gas flow control during the production process. For example, in the manufacturing of solar cells, MFCs control the flow of gases used in the chemical vapor deposition (CVD) process to deposit thin films of semiconductor materials on substrates. Therefore, the demand for alternative energy sources will drive market growth.

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