Dry vacuum pumps achieve oil-free and clean exhaust without using oil in the exhaust flow path!
We would like to introduce a case where a "high vacuum exhaust system for X-ray measurement experiment vacuum containers" was delivered to the Kansai Quantum Science Research Institute (Kizugawa).
This exhaust unit consists of a 300 L/s class magnetic bearing turbo molecular pump TG390M, which can be directly attached to the vacuum container, a combined vacuum gauge featuring a Pirani type and a cold cathode ionization vacuum gauge, along with a cart that holds the controllers and auxiliary pumps.
The turbo molecular pump attached to the vacuum container is of the magnetic bearing type, allowing for maintenance-free, oil-free operation with extremely low vibration exhaust. Additionally, the inlet flange uses a Conflat type with a copper gasket, which reduces the permeation of light gases from the gasket and the release of exhaust gases, while also enabling high-temperature baking.
【Case Overview】
■ Delivery Destination: National Research and Development Agency, Quantum Science and Technology Research Development Organization, Kansai Quantum Science Research Institute (Kizugawa)
■ Delivered Product: High vacuum exhaust system for X-ray measurement experiment vacuum containers
*For more details, please refer to the PDF document or feel free to contact us.