Atomic Force Microscope (AFM) "Park NX-Hivac"
Vacuum environment scanning suitable for fault analysis applications.
The "Park NX-Hivac" is a high vacuum atomic force microscope (AFM) designed for failure analysis and materials that are susceptible to environmental influences. It enables precise failure analysis of highly doped semiconductors. Additionally, by utilizing our already recognized technology, it has achieved low noise measurements with high resolution, high reproducibility, and operability. 【High Vacuum Measurement for Failure Analysis】 - Advanced StepScan automatic mechanism and laser alignment mechanism for high-speed scanning - Multi-sample chuck - Park's unique easy chip exchange function - Large vacuum chamber (300mm×420mm×320mm) - Direct optical microscope that enables ultra-long distance observation - Enhanced sensitivity high vacuum SSRM mode *For more details, please download the PDF or feel free to contact us.
- Company:パーク・システムズ・ジャパン
- Price:Other